Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Temperature Characteristics of Solid State Flow Velocity/Mass Sensor

반도체형 유속/유량센서의 온도특성

  • Choi, Jai-Gun (Department of Electrical Engineering Kyungpook National University) ;
  • Kim, Hyung-Pyo (Department of Electrical Engineering Kyungpook National University) ;
  • Park, Se-Kwang (Department of Electrical Engineering Kyungpook National University)
  • Published : 1995.05.31
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Abstract

A constant solid state flow velocity/mass sensor has been fabricated and its characteristics were measured according to flow velocity and fluid temperature. Parameters of the sensor circuit were obtained by simulation using finite difference method. Sensitivity was 10mW/(cm/sec) in the range of flow velocity 0-45cm/sec and response time was within two seconds. For the experiment of fluid temperature variation, the sensor output was compensated at the rate of temperature variation $0.1^{\circ}C/min$, however, with the rate of $0.2^{\circ}C/min$ it took two minutes to be compensated. Since it is not quite often to have such a rate of temperature variation of $0.2^{\circ}C/min$ or more, the developed sensor output can be used for most applications to detect small amount of flow-rate.

정온도형 반도체 유속/유량센서를 제작하여 유속변화와 온도변화에 대한 특성을 측정하였다. 회로의 파라메타는 유한차분법을 이용한 시뮬레이션으로 구하였다. 유속 실험에서 유속이 0-45cm/sec의 범위에서 감도는 10mW/(cm/sec)이고 응답시간은 2초 이내 였다. 유체온도 실험에서 온도 변화율이 $0.1^{\circ}C/min$이하에서는 센서출력은 자동 온도보상 되었고, 온도변화율이 $0.2^{\circ}C/min$일 때는 온도보상시간이 약 2분 소요되었다. 그러나 실제 유체온도변화율이 $0.2^{\circ}C/min$이상이 되는 경우가 많지 않기 때문에 개발된 센서는 대부분의 미소유량 측정에 사용될 수 있다.

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