Elastic properties of ion-assisted Cr films measured by brillouin light scattering

브릴루앙 산란 실험을 이용한 이온빔 보조 증착법의 Cr 박막의 탄성특성

  • ;
  • ;
  • ;
  • John R. Dutcher (Department of Physics, University of Guelgh)
  • Published : 1995.03.01

Abstract

We have performed Brillouin light scattering experiments to study the elastic properties of Cr films deposited on soda-lime glasses by using Ar-ion assisted deposition techniques. The elastic constants of the films increased as the ion-current density employed during the film deposition increases and they approached to the values of bulk Cr. The best fit values of the elastic constants of the films manufactured with ion current density of $400\muA/cm^{2}$are $c_{11}=296, c_{13}=83, c_{33}=289$, and $c_{55}=c_{44}=108(\times10^9/N/m^{2}}$ and these are 5% lower than those of bulk Cr in hexagonal symmetry. metry.

Ar이온빔의 보조 증착법으로 soda-lime유리판에 증착한 Cr박막을 브릴루앙 산란 실험을 통하여 박막의 탄성특성을 조사하였다. 박막증착시 사용된 이온의 전류 밀도가 증가할 수록 박막의 탄성계수가 증가하였으며 박막의 탄성특성이 bulk의 특성에 근접하였다. $400\muA/cm^{2}$의 이온전류밀도의 이온빔의 보조 증착으로 제작된 Cr박막의 탄성계수는 $c_{11}=296, c_{13}=83, c_{33}=289$, 그리고 $c_{55}=c_{44}=108(\times10^9/N/m^{2}}$이 었으며 이는 bulk의 값들에 비해 5% 감소한 것이다.

Keywords

References

  1. in Ion Bombardment Modification of surfaces Modification of Thin film Properties by Ion Bombardment during Deposition J.M.E.Harper;J.J.Cuomo;R.J.Gambino;J.R.Kaufman;O.Auciello(ed.);R.Kelly(ed.)
  2. in Progress in Optics ⅩⅩⅢ Optical films produced by ion-based techniques P.J.Martin;R.P.Netterfield;E.Wolf(ed.)
  3. Appl. Opt. v.22 Ion-beam-assisted Deposition of Thin Films P.J.Martin;H.A.Macleod;R.P.Netterfield;C.G.Pacey;W.G.Sainty
  4. 한국광학회지 v.4 Cr 박막의 이온빔 보조 중착 유광림;황보;창권
  5. in Light Scattering in SolidsⅢ, Topics in Applied Physics 51 Trends in Brillouin scattering : Studies of opaque materials, supported films, and central modes J.R.Sandercock;M.Cardona(ed.);G.Guntherodt(ed.)
  6. in Physical Acoustic v.Ⅸ G.W.Farnell;E.L.Adler;W.P.Mason(ed.);R.N.Thurston(ed.)
  7. Acoustic Fields and Waves in Solids v.1 B.A.Auld
  8. 한국광학회지 v.5 이중 패브리-페로 간섭계에 대한 분광학적 분석방법 이석목;George,I.Stegeman
  9. Landolt-Bornstein New Series v.18 Springer-Verlag
  10. Crystal Acoustics M.J.P.Musgrave