Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Synthesis and Characterization of $TiO_2$ Ultrafine Powder by Chemical Vapor Deposition

화학 증착법에 의한 $TiO_2$ 초미분의 제조 및 입자 특성에 관한 연구

  • 염선민 (부산대학교 무기재료공학과) ;
  • 이성호 (부산대학교 무기재료공학과) ;
  • 김광호 (부산대학교 무기재료공학과)
  • Published : 1995.01.01
Download PDF
⟨ Previous Next ⟩

Abstract

TiO2 fine powders were synthesized using oxygenolysis and hydrolysis reaction of TiCl4 vapor in gas phase. The TiO2 powder synthesized showed morphological differences depending on reaction system as follows: TiCl4-O2 reaction system produced the monosized particles having polyhedral shape with well-defined crystal planes and the particles did not agglomerate into secondary particles. TiCl4-H2O reaction system, whereas, produced the spherical secondary particles which consisted of fine primary particles. Other powder characteristics such as particle size, impurity content and rutile content are also reported in this study.

Keywords

References

  1. Ceramic Bull. v.63 no.6 High Purity Alumina by Controlled Precitation from Aluminium Sulfate Solution J.E. Blendell(et al.)
  2. Jpn. J. of Appl. Phys. v.12 no.1 Preparation of Fine Particels by Gas Evaporation Technique with Electron Beam Heating S. Iwama(et al.)
  3. Trans. of JWRI v.14 Laser Production of Ultrafine Particle A. Matsunawa;S. Katayami
  4. Mat. Sci. Forum. v.37 Nanophase Ultrafine-Grained Materials R.W. Siegel
  5. 일본화학학회지 v.6 Preperation of SnO₂ Ultrafine Particles by the Sputtering Methods T. Miyoshi;K. Onisawa
  6. IEEE, MAG v.21 no.5 Magnetic Properties of Fe-Base Amorphous Ultarfine particles S. Ohnuma(et al.)
  7. Jpn. J. of Appl. Phys. v.25 New Technique for the Formation of Ultrafine Particles by Sputtering S. Yatsuya(et al.)
  8. J. Kor. Ceram. Soc. v.29 no.9 Process Control for the Synthesis of Ultrafine Si₃N₄-SiC Powders by the Hybrid Plasma Processing H.J. Lee;T. Yoshida
  9. J. Kor. Ceram. Soc. v.30 no.4 Y-TZP Fine Powder Preparation by Ultrasonic spray Pyrolysis J.H. Lee(et al.)
  10. J. of Mat. Sci. v.20 Ultafine Particles of the ZrO₂-SiO₂ System Prepared by the Spray-ICP Technique T. Ono(et al.)
  11. J. of Am. Cer .Soc. v.59 no.3 TiO₂ Produced by Vapor-Phase Oxygenolysis of TiCl₄ Y. Suyama;A. Kato
  12. Communication of the Am. Cer. Soc. v.June-c Effect of Additives on the Fromation of TiO₂ Particles by Vapor Phase Reaction Y. Suyama;A. Kato
  13. 일본세라믹학회지 v.96 Synthesis of Fine AIN Powder by Vapor Phase Reaction of AlCl₃ and NH₃ I. Kimra(et al.)
  14. 일본화학공학논문집 v.15 Vapor-Phase Synthesis of SiC Ultrafine Particles from Si-H₄/C₂H₂ Premixed Gas M. Sadakata(et al.)
  15. Advanced Cer. Mat. v.3 no.5 Continuous Production of Fine TiO₂ Powder by Vapor-Phase Hydrolysis of Titanium Tetraisopropoxide J. Kirkbir;H. Komiyama
  16. Advances in Ceramic;J. of Am. Cer. Soc. v.21 Vapor-Phase Synthesis of Ceramic Powder A. Kato;G.L. MessingI(et al.)
  17. 일본화학공학논문집 v.13 no.2 Production Mechanism of TiO₂ Fine Particles by Gas-Phase Reaction S. Morooka;T. Yasutake;A. Kobata
  18. Chem. Lett. v.5 Low Temperature Synthesis of TiO₂ by Vapor Phase Hydrolysis of Titanium Isopropoxide Fikret;H. Komiyama
  19. J. Kor. Ceram. Soc. v.29 no.7 Preparation and Characterization of Fine TiO₂ Powders by Vapor Phase Hydrolysis of TiCl₄ S.M. Yeom;K.H. Kim;D.W. Shin;C.G. Park
  20. Elements of X-Ray Diffraction B.D. Cullity
  21. 일본화학회지 v.4 Formation of Rutile TiO₂ Powders by Vapor Phase Reaction Y. Suyama;K. Ohmura;A. Kato
  22. 일본화학공학논문집 v.13 no.2 Production Mechanism of TiO₂ Fine Particles by Gas Phase Reaction S. Morooka;T. Yasutake;A. Kobata
  23. Emergent Process Methods For High-Technology Ceramics A. Kato;J. Hojo;T. Watari;R. F. Davis(ed.);H. Palmour Ⅲ(ed.);R. L. Porter(ed.)