A Study on the Characteristics of $TiO_2$ Thin Films by Sol-Gel Process

졸-겔법에 의한 $TiO_2$ 박막의 특성에 관한 연구

  • 황규석 (전남대학교 무기재료공학과) ;
  • 김병훈 (전남대학교 무기재료공학과)
  • Published : 1995.03.01

Abstract

to prepare the TiO2 thin films, acetyl-acetone(2.4-pentanedione)(1 : 1 molar ratio) was dissolved in the propanol solution of titanium(IV)isopropoxide(Ti[OCH(CH3)2]4). Al, Cr and Sb in the form of soluble salt and niobium ethoxide were added s dopants, respectively. Thin films were coated by the dip-coating method and characteristics were investigated by XRD, SEM and conductance meter. As a result, viscosity of sol was maintained below 4 centi Poise more than 20 days, and crystal growth and diminution of resistivity occurred as the heat treatment temperature increased. The grains grew over 1${\mu}{\textrm}{m}$ and the lowest resistivity was obtained when Nb was added at 130$0^{\circ}C$.

Keywords

References

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