한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제32권6호
  • /
  • Pages.685-696
  • /
  • 1995
  • /
  • 1229-7801(pISSN)
  • /
  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
권호 표지

SiC/C 경사기능재료(FGM)의 합성을 위한 SiC/C 분율 조절

The Control of SiC/C Ratio for the Synthesis of SiC/C Functionally Gradient Materials

  • 김유택 (경기대학교 재료공학과) ;
  • 최준태 (한양대학교 세라믹공학과) ;
  • 최종건 (한양대학교 세라믹공학과) ;
  • 오근호 (한양대학교 세라믹공학과)
  • 발행 : 1995.06.01
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초록

The most important techniques in the synthesis of SiC/C function gradient material (FGM) are to control the SiC/C ratio and to obtain the moderate deposition rate. For these, various gas systems and flow rates were attempted and evaluated. It turned out that the CH4＋SiCl4＋H2 system was suitable for the deposition of SiC-rich layers, the C3H8＋SiCl4＋Ar system for the deposition of carbon-rich layers, and the C3H8＋SiCl4＋H2＋Ar system was good to deposit the layers between them.

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참고문헌

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