Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

IR Transmittance and Surface Structure of Diamond Film Polished by Thermomechanical Method

열기계적으로 연마한 다이아몬드 막의 적외선 투과도 및 표면구조

  • 정상기 (한국과학기술원 재료공학과) ;
  • 최시경 (한국과학기술원 재료공학과) ;
  • 정대영 (한국과학기술원 재료공학과) ;
  • 최한메 (한국과학기술원 재료공학과) ;
  • 권순용 (한국과학기술원 재료공학과)
  • Published : 1995.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

The rough growth surfaces of diamond films fabricated by the hot filament CVD were polished using thermomechanical polishing method. And then, its application to the optical windows was discussed through the measurement of transmittance in the range of infrared radiation and analysis of surfaces structure. The results were compaerd with those of the films polished with conventional mechanicla polishing. The transmittance of the mechanically polished film reached 57~66% over the whole range from 500 to 4000 cm-1. But the transmittance of the film polished with thermomechanical polishing method was reduced below 35%. This decrease in transmittance was due to both the graphitization of diamond on the polished surface and the growth of $\beta$-SiC at diamond/Si interface during polishing. The residual Fe in hte thermomechanically polished surface was confirmed by SIMS analysis. This Fe played the role of the graphitization of near surface region of the diamond film.

Keywords

References

  1. J. Am. Ceram. Soc. v.72 Diamond-Ceramic Coating of the Future K.E. Spear
  2. Diamond Films and Technology v.1 Diamond Transmissive Windows Y. Tzeng
  3. 2nd International Conference on the Application of Diamond Films and Related Materials Smooth Diamond Film for Optical Applications P. Koidl;C. Wild;R. Locher;R. Kohl;M. Yishikawa(et al.)(ed.)
  4. SPIE Diamond Optics Ⅲ v.1325 Development and Performance of a Diamond Film Polishing Apparatus with Hot Metals M. Yoshikawa
  5. SPIE Diamond Optics Ⅳ v.1534 Polishing of Filament Assisted CVD Diamond Films C.F. Hickey;T.P. Thorpe;A.A. Morrish;J.E. Butler;C. Vold;K.A. Snail
  6. Thin Solid Films v.212 Study on the Polishing of Chemically Vapour Deposited Diamond Film H. Tokura;C.F. Yang;M. Yoshikawa
  7. SPIE Diampnd Optics Ⅲ v.1325 Diamond Film Polishing with Argon and Oxygen Ion Beams Z. Tianji;D.F. Grogan;B.G. Bovard;H.A. Macleod
  8. SPIE Diamond Optics Ⅳ v.1534 Smooth Diamond Films by Reactive Ion Beam Polishing B.G. Bovard;T. Zhao;H.A. Macleod
  9. Thin Solid Films v.212 Smoothing of Chemically Vapour Deposited Diamond Films by Ion Beam Irradiation A. Hirata;H. Tokura;M. Yoshikawa
  10. J. Jpn. Soc. Precision Eng. v.56 Processing of CVD Diamond Films by YAG Laser S.Tezuka;M. Yoshikawa
  11. SPIE Diamond Optics Ⅲ v.1325 Optical Properties of Polycryatslline Diamond Films in the Far-Infrared A.J. Gatesman;R.H. Giles;J. Waldman
  12. SPIE Diamond Optics Ⅲ v.1325 Infrared Measurements of CVD Diamond Films X.H. Wang;L. Pilione;W. Zhu;W. Yarbrough;W. Drawl;R. Messier
  13. J. Mater. Res v.5 Infrared Optical Properties of CVD Diamond Films X.H. Wang;L. Pilione;W. Zhu;W. Yarbrough;W. Drawl;R. Messier
  14. Surf. Sci. v.165 The Diamond Surface: Atomic and Electronic Structure B.B. Pate
  15. Surf. Sci. v.65 The Diamond surface Ⅱ. Secondary Electron Emission P.G. Lurie;J.M. Wilson
  16. Nucl. Instr. and Meth in Phy. Res. v.B52 Comparison of the Effect of Argon and Hydrogen Ion Bombardment on the Diamond (100) Surface as Studied by AES and EELS A. Hoffman;P.J.K. Paterson;S. Prawer
  17. The Properties of Diamond J.E. Field
  18. Am. Ceram. Soc. Bull. v.50 Graphitization of Diamond K.J. Rone;A.D. Miller;D.B. Fischbach
  19. J. Mater. Res. v.4 Characterization of Diamond Thin Films: Diamond Phase Iderntification, Surface Morphology, and Defect Structures B.E. Williams;J.T. Glass
  20. Appl. Phys. Lett v.54 In Situ Characterzation of Diamond Nucleation and Growth D.N. Belton;S.J. Harris;S.J. Schmieg;A.M. Weiner;T.A. Perry
  21. Appl. Phys. Lett. v.54 Early Stages of Plasma Synthesis of Dimond Films R. Meilunas;M.S. Wong;K.C. Sheng;R.P.H. Chang;R.P. Van Duyne
  22. J. Mater. Res. v.6 Near-Interface Characterization of Diamond Films on Silica and Silicon D.J. Pickrell;W. Zhu;A.R. Badzian;R.E. Newnham;R. Messier
  23. J. Crystal Growth v.99 The Analysis of Defect Structures and Substrate/Film Interfaces of Diamond Thin Films B.E. Williams;J.T. Glass;R.F. Davis;K. Kobashi
  24. J. Mater. Res. v.6 Characterization of Thermal Plasma CVD Diamond Coatings and the Intermediate SiC Phase C. Tsai;W. Gerberich;Z.P. Lu;J. Heberlein;E.Pfender