OBSERVATION OF THE MAGNETIC DOMAIN IN THIN-FILM HEADS BY ELECTRON MICROSCOPY

  • Published : 1995.10.01

Abstract

Magnetic domains were observed using an image lock-in technique for backscattered electron contrast (Type II) with a 200 kV scanning electron microscope. Backscattered electrons indicate a difference in magnetic domain structures at the upper and lower parts of the upper pole in thin-film heads, changing the acceleration voltage. With this method, it is also possible to observe the domain structure of the thin-film head pole through a 10 to $20\;\mu\textrm{m}$ protective layer, and the upper shield of the MR head through the coil in the resist, alumina overcoat, and upper pole.

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