Prediction of the optical properties of $TiO_2$/Ag/$TiO_2$ films using transfer matrix and comparisions with real transmittance measured on the sputter-deposited films

Transfer Matrix를 사용하여 예측한 $TiO_2$/Ag/$TiO_2$ 박막의 광학적 성질 및 스퍼터 증착된 박막과의 특성 비교

  • 김진일 (홍익대학교 공과대학 금속 재료공학과) ;
  • 김진현 (홍익대학교 공과대학 금속 재료공학과) ;
  • 김영환 (홍익대학교 공과대학 금속 재료공학과) ;
  • 오태성 (홍익대학교 공과대학 금속 재료공학과)
  • Published : 1995.02.01

Abstract

Optical properties of $TiO_{2}$. Ag filrns and $TiO_{2}/Ag/TiO_{2}$ multilayer filrns with different thickness were predicted using the transfer matrix, and these results were compared with real transmittance curves of the sputterdeposited films. With the complex refractive indices, it was possible to predict transmittance characteristics which were close to real data for $TiO_{2}$ and Ag films. Due to the diffusion and agglomeration of Ag during $TiO_{2}$ deposition, optical properties of the sputterdeposited $TiO_{2}/Ag/TiO_{2}$ films were found to be very different from the transmittance curves predicted using the transfer matrix. Using deposition of 4nm-thick or 6nm-thick TI layers as a diffusion barrier, however, the transmittance curves of $TiO_{2}/Ti/Ag/Ti/TiO_{2}$ five-layer films became similar to ones predicted for $TiO_{2}/Ag/TiO_{2}$ threeiayer films.

Keywords

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