Surface Morphology and Preferred Orientation of Gold Bump Layer formed by using $Na_3[Au(SO_3)_2]$

아황산금나트륨염을 이용한 Au 범프용 금도금층의 표면형상 및 우선적 결정 성장방향

  • Kim, In-Su (Dept. of Metallurgical Engineering, Hanyang University) ;
  • Yang, Seong-Hun (Dept. of Metallurgical Engineering, Hanyang University) ;
  • Park, Jong-Wan (Dept. of Metallurgical Engineering, Hanyang University)
  • 김인수 (한양대학교 공과대학 금속공학과) ;
  • 양성훈 (한양대학교 공과대학 금속공학과) ;
  • 박종완 (한양대학교 공과대학 금속공학과)
  • Published : 1995.09.01

Abstract

Surface morphology and preferred orientation of 20${\mu}{\textrm}{m}$ gold electrodeposit formed from aqueous solution of the sodium gold sulfite were studied in terms of current density, plating temperature and Au concentration. As the current density changed from 13.0mA/$\textrm{cm}^2$ to 4.6mA/$\textrm{cm}^2$, the solution temperature from 3$0^{\circ}C$ to 6$0^{\circ}C$, pH from 12.0 to 9.0, agitation speed from 0 rpm to 3200rpm and Au concentration from 10g/1 to 14 g/1, local Au concentration near the cathodic surface increased. With increasing the Au concentration, the surface morphology chanced from porous structure to fine-grained structure. Furthermore, it was observed that the preferred orentation of the Au layer changed from (111) to (220) upon the same variation In the Au concentration. The surface morphology and the preferred orientation of the Au layer were found to be closely related to each other.

아황산금나트륨염을 이용하여 형성된 약 20$\mu\textrm{m}$ 금도금층의 표면형상 및 우선적 결정 성장 방향에 대하여 전류밀도, 온도, 농도, pH, 교만속도, 금이온농도가 미치는 영향에 대하여 연구하였다. 표면형상은 cathode 근처의 금이온농도가 증가하는 조건[전류밀도(13.0mA/$\textrm{cm}^2$2$\longrightarrow$4.6mA/$\textrm{cm}^2$)], 온도 (3$0^{\circ}C$$\longrightarrow$6$0^{\circ}C$), pH(12.0$\longrightarrow$9.0), 교반효과(Orpm$\longrightarrow$3200rpm), 금이온농도(10g /1$\longrightarrow$l4g/1)으로 갈수록 porous한 조직에서 미세한 조직으로의 변화가 관찰되었다. X선분석에 의하면 금도금층의 결정성장의 주방향은 표면형상과 밀접한 관계를 나타내었으며 표면형상이 미세화되는 조건인 전류밀도(13.0$\longrightarrow$14.6mA/$\textrm{cm}^2$), pH(12.0$\longrightarrow$9.0)는 감소 할수록, 온도(3$0^{\circ}C$$\longrightarrow$6$0^{\circ}C$), 교반속도(0rPm$\longrightarrow$3200rpm), 금이온농도(10g/1$\longrightarrow$g/1)]는 증가 할수록 결정성장의 주회절피크는 (111)에서 (220)으로 그 성장면이 변하고 있음이 조사되었다.

Keywords

References

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