Journal of the Korean Institute of Telematics and Electronics A (전자공학회논문지A)
- Volume 33A Issue 6
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- Pages.172-177
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- 1996
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- 1016-135X(pISSN)
Characterization of PECVD and LPCVD a-Si films crystallized by excimer laser
엑시머 레이저를 이용하여 결정화한 PECVD 및 LPCVD 비정질 실리콘 박막의 특성 분석
Abstract
We have characterized XeCl excimer-laser-induced crystallization of thin amorphous silicon films deposited by PECVD (