Diffusion of buried contact grooves with spin-on source

스핀 온 소스를 이용한 함몰형 전극 형성을 위한 확산

  • A.U. Ebong (Photovoltaic Devices Laboratory, Samsung advanced Institute of Technology, Suwon 440-600, Korea) ;
  • S.H. Lee (Photovoltaic Devices Laboratory, Samsung advanced Institute of Technology, Suwon 440-600, Korea)
  • Published : 1996.08.01

Abstract

The present processing sequence for solar cells is very elaborate and ads to the cost of the fabricated cells. This processing cost, which accounts for about 30% of the total cost, can be reduced if the many high temperature sequences can be reduced without significantly reducing the cells energy conversion efficiency. By using the spin-on glasses (SOG) in conjunction with the conventional tube furnace (CTF) or rapid thermal annealer (RTA), the many high temperature process can be reduced to only one. In order to achieve efficiencies similar to the standard high temperature sequences using the solid or liquid sources, some basic characterization of the groove diffusion is necessary to ascertain the its suitability. This paper describes the work done in diffusing the buried contact grooves using the phosphorus SOG.

태양전지의 공정중 고온공정을 줄여줌으로서 최종 태양전지의 가격을 저가화할 수가 있다. 이 논문은 점액 상태의 인을 희석시켜서 접촉 홈에 확산공정을 마친 후, 그 기본 특성을 조사하였다. 점액상태점의 희석도와 스핀속도가 산화막의 두께에 영향을 미치는 것이 확인되었다. 희석도가 높을수록 산화막은 두꺼워지고 균일도는 낮아졌다. 희석도 60%의 인이 홈에서의 균일도와 깊이를 고려할 때 가장 적당한 것으로 사료된다.

Keywords

References

  1. Appl. Phys. Lett. v.59 B. Hartiti;A. Slaoui;M. Loghmarti;J. C. Muller;P. Siffert
  2. J. Electrochem. Soc. v.138 G. Sanchez;J.L. Castano;J. Garrido;J. Martinez;J. Piqueras
  3. Conf. Proc. 12th IEEE PV Specialist Conf. T.C. Chandler, Jr.;R.B. Hilborn, Jr.;J.W. FAust, Jr.
  4. Accepted for publication in Journal of Solar Energy materials and Solar Cells A.U. Ebong;C.B. Honsberg;S.R. Wenham
  5. Conf. Record, 23rd IEEE Photovoltaic Specialist Conference R. Schindler;I. Reis;B. Wagner;A. Eyer;H. Lautenschlager;C. Schetter;W. Warta;B. Hartiti;A. Slaoui;J.C. Muller;P. Siffert
  6. Ph.D. Thesis, The University of New South Wales Laser Groove Silicon Solar Cells S.R. Wenham
  7. Conf. Proc. 32nd ANZES Conf. On Solar Energy Y.D. Huang;A.B. Sproul;A.U. Ebong;M.A. Green