The specimen preparation for the high energy electron diffraction and reflection electron microscopy observation

고에너지 회절무늬 및 반사전자현미경 관찰을 위한 시편준비

  • Published : 1996.11.01

Abstract

The use of reflection high energy electron diffraction and reflection electron microscopy technique has been increased with increasing number of studieds on surfaces of single crystals and epitaxial growth layers. Here, the speciment preparation techniques are summerized for these two techniques which are not so polular in the country. The panoramic reflection high energy electron diffraction maps have been completed and an example of Pt(111) surface was demonstrated.

단결정 표면 및 에피 증착증 표면에 대한 연구가 많아지면서 고에너지전자회절 및 반사전자현미겨의 이용도 늘고 있다. 국내에서는 아직 보편화 되지 않은 이들 두 기술을 위한 시편분비 과정을 요약하였고, 고에너지전자회절 연구시 매우 유용하게 쓰이는 연속 고에너지전자회절 패턴 지도 작성법에 대해 설명하고 그 예를 제시하였다.

Keywords

References

  1. Ultramicroscopy v.11 T. Hsu;J.M. Cowley
  2. Surf. Sci. v.258 Y. Kim;T. Hsu
  3. Many papers in NATO ASI Series B : Physics v.188 P.K. Larsen(Ed.);P.J. Dobson(Ed.)
  4. Ultramicroscopy v.26 K.K. Christenson;J.A. Eades
  5. J. Microscopy v.146 T. Hsu;J.M. Cowley;L.M. Peng;H.J. Ou
  6. Ultramicroscopy v.32 L.M. Peng
  7. Chemistry and Physics of Solid Surface Ⅵ. D.J. Smith
  8. Materials Research Society Symposium Proc.(Materials Res. Soc., 1985) v.60 D.W. Susnitzky;Y.K. Simpson;B.C. DeCooman;C.B. Carter
  9. J. Appl. Cryst. v.20 K. Yagi
  10. Ultramicroscopy v.15 Y. Uchida;G. Lehmpfuhl;J. Jager
  11. J. Electron Microscopy Tech. v.5 T. Hsu
  12. J. Appl. Phys. v.38 G.S. Anderson
  13. Surf. Sci. v.96 D.E. Aspnes;A.A. Studna
  14. J. Chem. Phys. v.57 W.H. Weinberg
  15. Phys. Rev. v.B30 B.K. Agrawal