Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Study on Properties of Antimony-doped Tin Oxide Thin Films Prepared by Sputtering

Sputtering 방법에 의해 제조된 Sb가 도핑된 주석산화물 박막의 특성에 관한 연구

  • Published : 1996.07.01
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Abstract

Antimony-doped Tin oxide (ATO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering technique. Effects of DC power film thickness and post heat-treatment on electrical conductivity of ATO film were investigated. Other properties of ATO film such as optical anti-chemical and wear properties were also reported in this work. The obtained ATO films showed electrical resistivities ranging from 5$\times$10-3 $\Omega$cm to 3$\times$10-3 $\Omega$cm with the average optical transparency above 80% in visible wavelength range and excel-lent anti-chemical properties where the electrical resistivity was not changed even after soaking the films in 1M HCl or 1M NaOH solution for 10 days. These properties were found to be related to the crystallinity of ATO film and the films having higher crystallinity showed better properties.

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References

  1. Thin Solid Films v.102 Transparent Conductors-A Status Review K.L. Chopra;S. Major;D.K. Pandya
  2. New Glass v.10 no.2 Application of Optical Thin Films E. Kamijo
  3. J Electrochem. Soc v.123 Physical properties of SnO₂Materials I. Preparation and Defect Structure Z.M. Jarzebski
  4. New Glass v.10 no.2 The Textured SnO₂Film for an a-Si Solar Cell K. Adachi
  5. Thin Solid Films v.113 Influence of Annealing on the Phase composition,Transmjssion;Resistivity of SnO, thin films B. Beensh-Marchwicka;L. Krol-Stepniewsk;A. Misiuk
  6. Thin Solid Films v.77 Tin Oxide Coatings:Physcal Properties and Applications H.D.E Waal;F. Simons
  7. Thin Solid Films v.189 Electrical and Optical Properties of Pyrolytically Sprayed SnO₂Films V. Vasu;A. Subrahmanyam
  8. Thin Solid Films v.182 Optical Properties of Nonstoichiometric Tin Oxide Films Obtained by Reactive Sputtering A. Czapla;E. Kusior;M. Bucko
  9. J. Phys. D: App. Phys v.16 High-Temperature Annealing Effects on Tin Oxide Films K B. Sundaram;G.K. Bhagavat
  10. J. Electrochem Soc. v.132 no.6 Thickness Dependence of Transport Properties of Doped Polycrystalline Tin Oxide Films D. Belanger;J.P. Dodelet;B.A. Lombos;J.I. Dickson
  11. J Electrochem. Soc. v.135 no.4 Doping Tin-Oxide Films by Ion Implantation C.F. Wan;R.D. McGrath;W.F. Keennan;Y.S. Tung;S.N. Frank
  12. Thin Solid Films v.199 Characterization of Fluorine-Doped Tin Oxide Produced by the Pyrosol Method B. Gottlieb;R. Koropecki;R. Arce;R. Crisalle;J. Ferron
  13. J. Phys Soc Jpn. v.15 no.5 The Study of the Optical Properties of Conducting Tin Oxide Films and Their Interpretation in Terms of a Tentative Band Scheme T. Arai
  14. J. Electrochem. Soc v.117 Electrochemical Properties of Polycrystalline Tin Oxide D. Elliott;D.L. Zellmer;H.A. Laitinen
  15. J. Am. Ceram. Soc. v.57 no.6 Electrical and Optical Properties of Tin Oxide Films A. Rohatgi;T.R. Viverito;L.H. Slack
  16. J. Electrochem Soc. v.123 no.12 Effects of Additions to SnO₂Thin Films A.F. Carroll;L.H. Slack
  17. J. Vac. Sci. Technol. v.14 Tin Dioxide Films Prepared by dc Sputtering from a Pressed Powder Target A.G. Sabnis;L.D. Feisel
  18. Thin Solid Films v.108 Characterization of Antimony-Doped Tin Oxide Films for Solar Cell Applications N.S. Murty;S.R. Jawalekar
  19. J. Appl. Phys. v.51 no.12 Electrical and Optical Properties of Undoped and Antimony-doped Tin Oxide Films E. Shanthi;V. Dutta;A. Banerjee;K.L. Chopra
  20. J. Electrochem. Soc. v.137 no.1 Dip-Coating of Sb-Doped SnO₂Films by Ethanolamine-Alkoxide Method Y. Takahashi;Y. Wada
  21. J. Am. Ceram. Soc. v.77 no.4 Effect of Antimony Addition on Electrical and Optical Properties of Tin Oxide Film K.H. Kim;S.W. Lee