E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제9권8호
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- Pages.776-782
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- 1996
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
진공증착중합법을 이용하여 PMDA와 4,4'-DDE 단량체로 제조한 polyimide박막의 전기전도 특성
The electrical conduction characteristics of polymide thin films fabricated by vapor deposition polymerization(VDP) method based on PMDA and 4,4'-DDE monomer
초록
The electrical properties of vapor deposition polymerized polymide thin films for getting an in-line system with manufacturing process of semiconductor device, have been studied. Polyimide thin films fabricated by vapor deposition polymerization(VDP) method based on PMDA and 4,4'-DDE monomer were confirmed by FT-IR spectra. It is found that the major conduction carriers of thin films are ions, and the hopping length of ions is almost same with monomer length at the temperature over 120.deg. C through the analysis of electrical conduction mechanism. Also, The activation energy is about 0.69 eV at the temperature of
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