한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

초정밀 조미동 위치결정기구의 설계 및 제어에 관한 연구

A Study on the Design and Control Super-Precision Coarse and Fine Positioning Apparatus

  • Kim, J.Y. (Factory Automation Research Center for Parts of Vehicles, Chosun University) ;
  • Cho, Y.T. ;
  • O, S.M. ;
  • Park, K.H.
  • 발행 : 1996.10.01
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초록

The study was carried out development a pricision positioning apparatus, consisting of DG servo motor and piezoelectric actuatior. This system is composed of fine and coarse apparatus, measurement system and control system. Peezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is droved by DC servo motor. Control system output a signal from laser interfermeter and capacitive sensor to amplifer of DC servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer and microsense

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