짧은 채널 효과의 억제를 위한 ISRC (Inverted-Sidewall Recessed-Channel)구조를 갖는 0.1$\mu\textrm{m}$ nMOSFET의 특성

Supperession of Short Channel Effects in 0.1$\mu\textrm{m}$ nMOSFETs with ISRC Structure

To suppress the short channel effects in nMOSFET with 0.1.mu.m channel length, we have fabricated and characterized the ISRC n MOSFET with several process condition. When the recess oxide thickness is 100nm and the channel dose for threshold voltge adjustment is 6*10$^{12}$ /c $m^{-2}$ , B $F_{2}$$^{+}$, the maximum transconductance at $V_{DS}$ =2.0V is 455mS/mm and the BIDL is kept within 67mV. By comparing the ISRC n MOSFET with the conventioanl SHDD (shallowly heavily dopped drain) nMOSFET, we verify the suppression of short channel effects ISRC structure.e.