The Sensing Characteristics of $WO_3$ Thin Films for $NO_x$ Gas Detection with the Change of Deposition Methods

증착방법에 따른 $NO_x$가스 감지용 $WO_3$박막센서의 특성 변화 연구

  • 김태송 (한국과학기술연구원 세라믹스부) ;
  • 김용범 ((주) 우영 기술연구소) ;
  • 유광수 (서울시립대학교) ;
  • 성기숙 ((주) 우영 기술연구소) ;
  • 정형진 (한국과학기술연구원 세라믹스부)
  • Published : 1997.04.01

Abstract

In order to apply WO3 thin films to the semiconducting NOx gas sensors as a sensing material, which have been expected to show good electrical properties, such as large sensitivity, rapid responsibility, and high selectivity, the fabrication method and their sensing characteristics were studied. The variations of surface morphologies, crystallographic orientations and crystallinity with the WO3 thin film growing methods thermal evaporation and DC sputtering methods were investigated by using scanning electron microscopy (SEM) and X-ray diffraction(XRD) analysis. As a result of sensitivity (Rgas/Rair) measurements for the 5 ppm NO2 test gas, the sensitivity values were 113 for the sputtered films and 93 for the evaporated films. It was also observed that the recovery rate of a sensing signal after measuring sensitivity was faster in the sputtered films than in the evaporated films.

Keywords

References

  1. Sensors and Actuators B v.23 Thin-Films Gas Sensors Based on Semiconducting Metal Oxides H. Meixner;J. Gerblinger;U. Lampe;M. Fleischer
  2. Sensors and Actuators B v.13-14 Development of High-Performance Solid-electrolyte Sensors for NO and NO₂ N. Miura;S. Yao;Y. Shimizu;N. Yamazoe
  3. Sensors and Actuators B v.23 $NO_x$ Sensor using $YBa_2Cu_3O_7-\delta$ Thin Films S. Kudo;H. Honishi;T. Matsumoto;M. Ippomatsu
  4. Sensors and Actuators B v.23 Detection of Combustible Gases by means of a ZnO-on-Si Surface Acostic Wave (SAW) Delay Line V.I. Anisimkin;M. Penza;A. Valentini;F. Quaranta;L. Vasanelli
  5. Sensors and Actuators B v.13-14 Characteristics of the Substituted Metal Phthalocyanine NO₂Sensor K. Moriya;H. Enomoto;Y. Nakamura
  6. Sensors and Actuators B v.26-27 The Effect of Additives in Tin Oxide in the Sensitivity and Selectivity to $NO_x$ and CO I. Sayago;J. Gutierrez;L. Ares;J.I. Robla;M.C. Horrillo;J. Getino;J. Rino;J.A. Agapito
  7. Sensors and Actuators B v.13-14 NO₂Gas Sensing Properties of Ga-doped ZnO Thin Film S. Matsushima;D. Ikeda;K. Kobayashi;G. Okada
  8. Jpn. Chemical Sensors v.9 no.Sup.B New Type $NO_x$ Sensor Based on Capacitance Change T. Ishihara;S. Sato;Y. Takita
  9. Sensors and Actuators B v.20 Titania $NO_x$ Sensors for Exhaust Monitoring K. Satake;A. Katayama;H. Ohkoshi;T. Nakahara;T. Takekuchi
  10. IEEE Trans, Electron Devices v.ED-26 Thin Film Semiconductor $NO_x$ Sensor S.C. Chang
  11. Sensor and Actuators B v.1 Response to Nitric oxide of Thin film and Thick SnO₂Films Containing Trivalent Additives G. Sberveglieri;S. Groppelli;P. Nelli;V. Lantto;H. Torvela;P. Romppainen;S. Leppavuori
  12. Sensor and Actuators B v.4 Highly Sensitive and Selective $NO_x$ and NO₂Sensor Based on Cd-doped SnO₂Thin Films G. Sberveglieri;S. Groppelli;P. Nelli
  13. Electroceramics V;Book 2 Mixed Oxide of CoO-In₂O₃As a Capacitive Nitric Oxide Sensor T. Ishihara;H. Fujita;S. Sato;T. Fukushima;H. Nishiguchi;Y. Takita;J.L. Baptista(ed.);J.A. Labrincha(ed.);P.M. Vilarinho(ed.)
  14. J. Electrochem. Soc. v.143 Mixed Potential Type $NO_x$ Sensor Based on Stabilized Zirconia and Oxide Electrode N. Miura;G. Lu;N. Yamazoe;H. Kurosawa;M. Hasei
  15. Chemistry Lett. Tungsten-Oxide Based Semiconductor Sensor Highly Sensitive to NO and NO₂ M. Akiyama;J. Tamaki;N. Miura;N. Yamazoe
  16. Sensors and Actuators B v.13-14 Tungsten-Oxide Based Semiconductor Sensor for Detection of Nitrogen Oxides in Combustion Exhaust M. Akiyama;Z. Zhang;J. Tamaki;N. Miura;N. Yamazoe
  17. Chemical Sensor Technology v.5 Semiconductor $NO_x$ Sensors for Exhaust Monitoring T. Takeuchi;K. Satake;M. Aizawa(ed.)
  18. 요업학회지 v.32 no.12 WO₃를 이용한 $NO_x$센서의 제조 및 가스감도 특성 유광수;김태송;정형진