Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Enhanced $Al_2O_3/Ti$ Interfacial Properties Using $NbC_xC_{1-x}/Y_2O_3$ Interlayers - (1) Sputtering and Thermal Stability

$NbC_xC_{1-x}/Y_2O_3$ 박막코팅을 이용한 $Al_2O_3/Ti$ 계면특성향상 - (1) 스퍼터링 및 열안정성

  • 문철희 (위스콘신 대학교 재료공학과 연구원 (현재 삼성전관 근무))
  • Published : 1997.08.01
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Abstract

Multilayer NbCxC1-x/Y2O3/Ti were sputter-coated on the alumina substrate, starting with a 0.7 ㎛ thick NbCxC1-x layer grown on substrate, followed by 0.7 ㎛ thick Y2O3 layer and 1 ㎛ thick Ti layer. To find out the optimum conditions for thickness uniformity and adhesion, sputtering works have been done with the variation of sputtering power and Ar pressure. After vacuum annealing at 950℃ and 1000℃, the thermal stability of the NbCxC1-x/Y2O3/Ti coated alumina substrates has been investigated by peel off test. The coating scheme didn't cause any debonded layer after an annealing at 950℃ for 3hrs. However, it was peeled off after annealing at 1000℃ for 3hr. It was found that the thermal stability of Al2O3/NbCxC1-x/Y2O3/Ti coating scheme changed with the NbCxC1-x composition.

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