Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Preparation of $CeO_2$ Based Solid Electrolyte Thin Films by Electrochemical Vapor Deposition

전기화학증착법에 의한 $CeO_2$계 고체전해질 박막의 제조

  • 박동원 (경북대학교 공과대학 금속공학과) ;
  • 김대룡 (경북대학교 공과대학 금속공학과)
  • Published : 1997.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

The yttria doped ceria (YDC) thin films were fabricated by electrochemical vapor deposition on the porous $\alpha$-Al2O3 substrate. The growth rates of the films obeyed a parabolic rate law, which constant was 259.0 $m^2$/hr at 120$0^{\circ}C$. As deposition temperature (above 110$0^{\circ}C$) increased, dense thin films were enhanced. Mole fraction of XYC13 had an effect upon surface morphologies. Electrical conductivity was increased with deposition temperature. The conductivity of YDC film prepared at XYC13=7.9$\times$10-2 was about 0.097 S/cm at 104$0^{\circ}C$ and the activation energy of conduction was calculated to be 26.6 kcal/mol.

Keywords

References

  1. J. Electrochem. Soc. v.139 no.9 Electrochemical vapor deposition of CeO₂; Kinetics of deposition of a composite, two-layer electrolyte J. F. Jue;J. Jusko;A. V. Virkar
  2. J. Electrochem. Soc. v.140 no.4 Temperature dependence of the kinetics of electrochemical vapor deposition of CeO₂ C. Tanner;J. F. Jue;A. V. Virkar
  3. DENKI KAGAKU v.62 no.11 Tensile test fof corrugated 8YSZ thin films SOFC K. Tomida;T. Namikawa;Y. Yamazaki
  4. DENKI KAGAKU v.62 no.7 A flexible alloy-wire interconnection for planar SOFC cathode N. Tomita;T. Namikawa;Y. Yamazaki
  5. DENKI KAGAKU v.61 no.3 Preparation of SOFC by MSC (Multi-layer slurry casting)process R. Okuyama;E. Nomura
  6. J. Solid State Chemistry v.13 no.360-364 Electronic conductivity in nonstoichiometric cerium dioxide R. N. Blumenthal;R. K. Sharma
  7. J. Chem. Phys. v.44 no.10 Electrical conduction by oxygen ions cerium oxide E L. Holverson;C. J Kevane
  8. J. Appl. Phys. v.38 no.5 Nature of the electrical conduction transients observed in CeO₂and Ca-doped CeO₂ R. N. Blumenthal;B. A Pinz
  9. J Electrochem. Soc. v.118 no.1 Studies of the defect structure of nonstoichiometric cerium dioxide R. N. Blumenthal;P. W Lee;R. J. Panlener
  10. J. Am. Ceram. Soc. v.50 no.12 Defect structure model for nonstoichiometric CeO₂ P. Kofstad;A Z. Hed
  11. 한국요업학회지 v.33 no.1 YSZ박막의 성장속도와 특성에 미치는 전기화학 증착 조건의 영향 (Ⅰ) 박동원;전치훈;강대갑;최병진;김대룡
  12. 한국요업학회지 v.33 no.3 YSZ박막의 성장속도와 특성에 미치는 전기화학증착 조건의 영향 (Ⅱ) 박동원;전치훈;김대룡
  13. Philips Res. Repts. v.13 A Method of Measuring Specific Resistivity and Hall Effect of Discs of Arbitrary Shape L J van der PAUW
  14. J Solid State Chemistry v.35 The grain-boundary effect in doped ccria solid electrolytes D. Y Wang;A. S. Nowick
  15. 한국요업학회지 v.31 no.5 전기화학증착에 의한 이트라아 안전화 지르코니아 박막의 제조 정지원;박동원;전치훈;최병진;김대룡
  16. AlchE. J. v.38 no.3 CVD of solid oxides in porous substrates for ceramic membrane modification Y. S. Lin;A. J. Burggraaf