A Study on Micromachining Using Stereolithographic Rapid Prototyping System

광조형법을 이용한 마이크로가공에 관한 연구

Recently, with a great interest in micromachine, it is more and more important to promote the way of manufacturing micromachine. The silicon process or the LIGA process was the main method to manufacture micromachine in the past. But, these manufacturing method was 2.5-dimensinal, there was the limit in manufacturing perfect 3-dimensional structure micromachine. In this study, we developed the rapid prototyping system for micromachining and tested its property. We also realized .mu. m-order manu- facturing and 3-dimensional structure processing. The results showed the possibility of micromachining with the rapid prototyping system.