Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지

PZT membrane Piezoelectric Traveling Wave Motor

  • xin, Shen-De (State Key Laboratories of Transducer Technology) ;
  • an, Zhang-Bao (State Key Laboratories of Transducer Technology) ;
  • Lu jinan-guo (State Key Laboratories of Transducer Technology) ;
  • qing, Yang-Gen (State Key Laboratories of Transducer Technology) ;
  • yuan, Wang-Wei (State Key Laboratories of Transducer Technology)
  • Published : 1997.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

A new type of piexoelectric membrane traveling wave motor has been designed and forbricated. The small motor is composed by the stator which is the combination of annular/circular membrane and metal elastic base using as the common electrode at some time and the rotor which is placed on the metal elastic body. Thus the motor structure is simple and easy to fabricate. The material of a piezoelectric membrane is fabricated by sol-gel method or wear-down method. A piezoelectric traveling wave motor has been fabricated with the stator diameter 8mm The total thickness of the stator is 350$\mu$m. Under the alternative excitation voltage 10-12V the revolving speed of the rotor is more than 100RPM.

Keywords