Abstract
$CdGa_2Se_4$, epilayer of tetragonal type are grown on Si(100) substrate by hot wall epitaxy method. The source and substrate temperature is $580^{\circ}C$ and $420^{\circ}C$ respectively, and the thickness of the film is 3 $\mu \textrm{m}$. The crystallihe structure of epilayers were investigated by double crystal X-ray diffraction(DCXD). Hall effect on this sample was measured by the method of van der Pauw and studied on carrier density and mobility depending on temperature. From Hall data, the mobility was likely to be decreased by pizoelectric scattering in the temperature range 30 K to 200 K and by polar optical scattering in the temperature range 200 K to 293 K. In order to explore of photocurrent to darkcurrent (pc/dc), maximum allowable power dissipation (MAPD), spectral response and response time. The results indicated that for the samples annealed in Se vapor the photoconductive characteristics are best. Then we obtained the sensitivity of 0.98, the value of pc/dc of $9.62{\times}10^6$, the MAPD of 321 ㎽ and the rise and decay time of 9 ㎳ and 9.5 ㎳, respectively.
수평 전기로에서 $CdGa_2Se_4$ 다결정을 합성하여 HEW 방법으로 $CdGa_2Se_4$ 박막을 성장하였다. $CdGa_2Se_4$ 박막 성장은 증발원과 기판의 온도를 각각 $580^{\circ}C$, $420^{\circ}C$로 성장하였을 때 이중 요동곡선(DCRC)의 반폭치(FWHM)값이 162 arcsec로 가장 작아 최적 성장조건이었으며, 성장된 박막의 두께는 3 $\mu \textrm{m}$ 였다. Van der Pauw 방법으로 Hall 쵸과를 측정하여 운반자 농도와 이동도의 온도의존성을 연구하였으며, 이동도는 30 K에서 200 K까지는 piezoelectric 산란에 기인하고, 200 K에서 293 K까지는 polaroptical 산란에 의하여 감소하였다. 광전도 셀의 특성으로 spectral response, 최대 허용 소비전력(MAPD), 광전류와 암전류(pc/dc) 및 응답시간을 측정하였다. Se 분위기에서 열처리한 광전도 셀의 경우 $\gamma$=0.98, pc/dc=$9.62{\times}10^6$ MAPD : 321 ㎽, rise time : 9 ㎳, decay time : 9.5 ㎳로 가장 좋은 특성을 얻었다.
