Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)
- Volume 7 Issue 3
- /
- Pages.494-503
- /
- 1997
- /
- 1225-1429(pISSN)
- /
- 2234-5078(eISSN)
Chemical reaction at Cu/polyimide interface
Cu/polyimide 계면에서의 화학반응
Abstract
We investigated the initial stages of formation of the Cu/polyimide interface using another two methods by X-ray photoelectron spectroscopy. : One, in-situ measurement with increasing of Cu deposition thickness onto polyimide(PI), the other, measurement with decreasing of Cu thickness of Cu/pI film by
Polyimide(PI)위에서 Cu의 초기 성장과정을 설명하기 위해, PI 위에 Cu를 조금씩 증착시키면서 그리고 PI 위에 Cu 층을 쌓아놓고 이 Cu 층을
Keywords