Dependence of defects on growth rate in (100) ZnSe cryseal

(100) ZnSe 결정에서 결함의 성장 속도에 대한 의존성

  • Published : 1998.04.01

Abstract

(100) ZnSe crystals with twin and grain free were grown by vapor transport method. The defect in (100) ZnSe crystals was investigated by FWHM of X-ray Rocking Curve. The growth rate and seed quality are the main parameters of the growth process to obtain the high quality ZnSe crystals. The geometric shape of the grown (100) ZnSe crystal is dependent on the shape of seed, isothermal line in furnace and the growth rate of each surface in crystal.

기상 결정 성장법을 이용하여 twin, grain free인 (100) ZnSe 결정을 성장하였다. (100) ZnSe 결정내의 결함은 X-ray Rocking Curve에 의해 분석하였으며, seed의 질과 성장 속도가 ZnSe 결정의 결함에 가장 큰 영향을 미쳤다. 성장된 (100) ZnSe 결정의 형태는 seed의 모양과 로내의 등온 곡선 및 면들의 성장속도에 의존하였다.

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