Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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The Sensitivity of Ultra Thin Pd-doped SnO$_2$ Gas Snesor Fabricated by Ion-Assisted Deposition for Methane Gas

이온빔 보조 증착법을 이용항 제작된 SnO$_2$에 초박막 Pd가 첨가된 박막형 가스센서의 메탄가스 감지특성

  • Cho, Jung (Thin Film Technology Research Center, Korea Institute of Science and Technology (KIST)) ;
  • Cho, Jun-Sik (Thin Film Technology Research Center, Korea Institute of Science and Technology (KIST)) ;
  • Yoon, Ki-Hyun (Department of Ceramic Engineering, Yonsei University) ;
  • Kim, Hyun-Joo (Division of General Education, Chung Ju National Univeristy) ;
  • Choi, Won-Kook (Thin Film Technology Research Center, Korea Institute of Science and Technology (KIST)) ;
  • Jung, Hyung-Jin (Thin Film Technology Research Center, Korea Institute of Science and Technology (KIST)) ;
  • Koh, Seok-Keun (Thin Film Technology Research Center, Korea Institute of Science and Technology (KIST))
  • 조정 (한국과학기술원, 박막기술연구센터) ;
  • 조준식 (한국과학기술원, 박막기술연구센터) ;
  • 윤기현 (연세대학교 세라믹공학과) ;
  • 김현주 (충주산업대학교 교양과학부) ;
  • 최원국 (한국과학기술원, 박막기술연구센터) ;
  • 정형진 (한국과학기술원, 박막기술연구센터) ;
  • 고석근 (한국과학기술원, 박막기술연구센터)
  • Published : 1998.08.01
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References

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