A Study on the Waste Water Recycling Technology for Semiconductor Industry

반도체 산업폐수의 재이용 기술에 관한 연구

Current semiconductor industry factories are relying on the end-of-pipe treatment technology for waste water treatment and thus they mostly suffer from severe industrial water shortage. As a result in order to solve those waste and industrial water problems, there requires to be changed to the Clean Technology, that is Pollution Prevention Technology. Through above strategic actions with the Clean Technology, we shall strength more powerful and logical environmental pollution prevention system than those in the past. By changing the end-of-pipe treatment technology for waste water treatment and thus they mostly suffer from severe industrial water problems, there requires to be changed to the Clean Technology, that is Pollution Prevention Technology. Through above strategic actions with the Clean Technology, we shall strength more powerful and logical environmental pollution prevention system than those in the past. By changing the end-of-pipe treatment technology with physical, chemical and biological treatment methods as a mixed stream basis for treating of semiconductor waste stream into clean technology with pollution prevention technology as a waste segregation basis, we can bet 20 to 30% investment reduction as compared with end-of-pipe treatment technology.The results for water quality analysis were as follows : 1. Water quality analysis of the before treatment : pH : 9~10.5, Conductivity : $300~7,000{\mu}s/cm$, TDS : more then $3,000mg/{\ell}$, COD : $200~250mg/{\ell}$, SS : $500~600mg/{\ell}$, n-H : $8.3mg/{\ell}$ 2. Water quality analysis of the after treatment : pH : 6.5~7.5, Conductivity : 0.059, TDS : $40{\mu}s/cm$, COD : $20mg/{\ell}$, SS : $5mg/{\ell}$ n-H : $0.6mg/{\ell}$