The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication and Characterization of$(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$ Thin Films by Pulsed Laser Deposition

펄스 레이저 증착법에 의한 $(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$ 박막의 제작 및 특성

  • Shim, Kyung-Suk (Dept.of Electric Engineering, Engineering College, Yonsel University) ;
  • Lee, Sang-Yeol (Dept. of Electrical Eng., Yonsei University)
  • Published : 1999.05.01
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Abstract

Dielectric thin films of PLT(28) ($(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$) have been deposited on $Pt/Ti/SiO_2/Si$ substrates in situ by a laser ablation. We have systematically changed the laser fluence from 0.4 J/$cm^2$ to 3 J/$cm^2$, and deposition temperature from $450^{\circ}C\; to\; 700^{\circ}C$. The surface morphology was changed from planar grain structure to columnar structure as the nucleation energy was increased. The PLT thin film with columnar structure showed good dielectric properties. The deposition temperature influenced on nucleation energy much stronger than the laser energy density did.

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References

  1. IEEE Circuits and Devices Magazine Ferroelectric Materials for 64 Mb and 256 Mb DRAMs Laureen H. Parker;Al F. Tasch
  2. 전기학회지 v.46 no.1 반도체 기억소자용 강유전체 박막의 연구 동향 이성갑;이영희
  3. 월간 세라믹스 v.9 no.98 강유전체 세라믹 박막기술로서의 DRAM소자 응용 박영진
  4. Jpn. J. Appl. Phys. v.34 no.98 Dielectric Relaxation of (Ba,Sr)TiO₃Thin Films Tsuyoshi Horikawa;Tetsuro Makita;Takeharu Kuroiwa;Noboru Mikami
  5. 전기학회지 v.46 no.4 레이저 어블레이션에 의한 강유전체 박막의 제작 및 응용 박창엽;이상렬
  6. J.Appl. Phys. v.81 no.6 Properties of ultra-thin lead zirconate titanate thin film prepared by ozone jet reactive evaporation Kazuyoshi Torii;Hirosi Kawakami;Hiroshi Miki;Keiko Kushida;Yoshihisa Fujisaki
  7. Appl.Phys. Lett. v.69 Nanoscale investigation of fatigue effects in Pb(Zr,Ti)O₃films A.Gruverman;O.Auciello;H.Tokumoto
  8. Mat.Res.Soc.Symp.Proc. v.361 The effects of La comcentration on the properties of PLT thin films: from the perspective of DRAM applications Seong Jun Kang;Jeong Seon Ryoo;Yung Sup Yoon
  9. Ferroelec - trics v.152 Properties of PLT thin films by thermal decomposition of metallo-organic compounds Wei Ren;Yun Liu;Jihui Qiu;LiangyingZhang;Xi Yao
  10. Jpn.J.Appl. Phys. v.34 no.6A Electrical Properties of Para- electric $(Pb_{0.72}La_{0.28})TiO_3$ Thin Films with High Linear Dielectric Permittivity: Schottky and Ohmic Contacts Sandwip K.Dey;Jong-Jan Lee;Prasad Alluri
  11. J.Appl.Phys. v.70 In Situ Layer Deposition of Superconducting $Y_1Ba_2Cu_3O_{7-y}$ Thin Films on GaAs Substrates S.Y.Lee;Q.X.Jia;W.A.Anderson;D.T.Show
  12. 전기학회지 v.45 no.5 펄스 레이저 증착법의 원리와 응용 이상렬
  13. 전기학회지 v.45 no.11 엑시머 레이저 어블레이션에 의한 YBCO 타겟 조성 및 표면의 변조 연구 정영식;이상렬
  14. Appl.Phys.Lett. v.66 no.2 Y.C.Ling;J.P.Wang;M.H.Yeh;K.S.Liu;I.N.Lin
  15. 전기전자재료학회 논문지 v.11 no.2 레이저어블레이션에 의한 (Pb,La)TiO₃박막의 제작 박정흠;김준한;이상렬;박종우;박창엽