Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Fabrication and Characteristics of WO$_3$ Thick Film Gas Sensor for Detecting NO$\chi$ Gas Using Screen Printing Technique

스크린 프린팅법을 이용한 NO$\chi$ 감지용 WO$_3$ 후막형 가스센서의 제조 및 특성연구

  • 박종현 (부산대학교 무기재료공학과) ;
  • 김태균 (LG 전자부품(주) 개발부) ;
  • 송호근 (LG 전자부품(주) 개발부) ;
  • 김광호 (부산대학교 무기재료공학과)
  • Published : 1999.03.01
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Abstract

스크린 프린팅법을 이용하여 NOX 감지용 WO3 후막형 가스센서를 제조하였다. 본 실험에서는 감지막의 소성 온도에따른 감도변화 및 Ru을 첨가함으로써 감도의 증진을 중점적으로 조사하였다. 또한 NO2 50 ppm하에서 CO, H2, CH4 그리고 i-C4H10등의 가스에 대하여 cross sensitivity를 조사하였다. WO3 가스센서는 소성온도 50$0^{\circ}C$, 작동온도 30$0^{\circ}C$에서 최대감도를 얻었다. 순수한 WO3에 Ru(0.004 wt%)을 첨가시 NO2 및 NO 가스에 대한 감도가 크게 증진되었다. 그러나 순수한 WO3 센서는 Ru(0.004 wt%)이 첨가된 WO3 센서보다 더 우수한 cross sensitivity를 보였다.

Keywords

References

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