Preparation of Carbon-Containing Silica Glass by Heat Treatment of Ormosil

세라믹/고분자 복합체의 열처리에 의한 탄소 함유 실리카 유리의 제조

  • 김구대 (한국과학기술연구원 세라믹공정연구센터) ;
  • 이동아 (한국과학기술연구원 세라믹공정연구센터) ;
  • 박지애 (한국과학기술연구원 세라믹공정연구센터) ;
  • 문지웅 (한국과학기술연구원 세라믹공정연구센터)
  • Published : 1999.05.01

Abstract

A carbon-containing silica glass was prepared from orgaincally modified silicate(Ormosil) by heat treatment in N2 atmosphere after the ormosil was synthesized using sol-gel method. The Ormosil was fabricated from the TEOS as the inorganic component and the PDMS as the organic component. The Ormosil changed to balck-coloured glass by carbon decomposed from the PDMS when the Ormosil was heated to 450$^{\circ}C$ 20hrs. A dense silicon oxycarbide glass with 2.08 g/cm3 was obtained by heating the Ormosil at 1050$^{\circ}C$ 10hrs. The microstructure of the carbon-containing silica glass was observed by SEM and the SiOxC4-x structure was confirmed by XPS measurement. The densification of the glass was studied by measurements of specific surface area linear shrinkage and geometric density.

Keywords

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