Effects of the Composition on the Consolidation Temperature and Refractive Index of the Glass Thin Film Fabricated by Aerosol Flame Deposition Method in $\textrm{SiO}_2$-$\textrm{B}_2\textrm{O}_3$-CaO-$\textrm{P}_2\textrm{O}_5$ System

$\textrm{SiO}_2$-$\textrm{B}_2\textrm{O}_3$-CaO-$\textrm{P}_2\textrm{O}_5$계에서 조성이 Aerosol Flame Deposition법에 의해 제조된 유리박막의 열처리 온도와 굴절률에 미치는 영향

  • Published : 1999.05.01

Abstract

The effects of the composition on the consolidation temperature and refractive index of the glass thin film fabricated by aerosol flame deposition method in SiO$_2$-B$_2$O$_3$-CaO-P$_2$O\ulcorner system were investigated. When the amount of CaO was constant in SiO$_2$-B$_2$O$_3$-CaO system the consolidation temperature of glass thin film decreased with increasing the amount of B$_2$O$_3$. Also, when the amount of SiO$_2$ and B$_2$O$_3$ was constant the consolidation temperature of glass thin film increased with increasing the amount of CaO. P$_2$O\ulcorner was added to 72.5SiO$_2$-25B$_2$O$_3$-2.5CaO in order to decrease its consolidation temperature. As the amount of P$_2$O\ulcorner increased its consolidation temperature decreased and the refractive index linearly increased from 1.4649 to 1.4684. When the amount of CaO and P$_2$O\ulcorner was constant in SiO$_2$-B$_2$O$_3$-CaO-P$_2$O\ulcorner system the consolidation temperature of glass thin film decreased with increasing the ratio of SiO$_2$/B$_2$O$_3$.

Keywords

References

  1. J. Non-Crystalline Solids v.123 Science and Technology of Laser Glass M.J.Weber
  2. Mat. Res. Soc. Symp. Proc v.392 Heteroepitaxy and Waveguide Formation for Solution Deposited LiNbO₃Thin Layers P.G.Clem;D.A.Payne
  3. Mat. Res. Soc. Symp. Proc v.392 Characterization of Magneto-Optical Rare Earth-Doped InGaAsp Thin Films on InP B.J.Stadler;K.Vaccaro;A.Davis;E.A.Martin;G.O.Ramseyer
  4. Proceedings of the IEEE v.68 no.10 Materials and Process for Fiber Preform Fabrication-Vapor Phase Axial Deposition T.Izawa;N.Inagaki
  5. Optical and Quantum Electronics v.22 Silica Waveguide on Silicon and Their Application to Integrated Optic Components M.Kawachi
  6. Solid State Tech. Si-based Integrated Optics Technologies T.Valette;J.P.Jadot
  7. Mat. Res. Soc. Symp. Proc v.392 Waveguides Fabricated in Fused Silica by Germanium Ion Implantation at Varyign Doses Patrick W. Leech;Mark C.Ridway
  8. Mat. Res. Soc. Symp. Proc v.392 Fabrication of Er-Doped Glass Films as used in Planar Optical Waveguides J.A.Gates;A.J.Bruce;J.Shmulovich;Y.H.Wong;G.Nykolak;M.R.X.Barros;R.Ghosh
  9. IEEE Photonics Tech. Lett. v.3 no.9 Reflow and Burial of Channel Waveguides Formed in Sol-Gel Glass on Si Substrates R.R.A.Syms;A.S.Holmes
  10. J. Non-Crystalline Solids v.129 Aerosol Techniques for Glass Formation T.F.Morse;A.Kilian;L.Rinhart
  11. J. Physics and Chemistry of Glasses v.19 no.3 Fusion Temperatures of $SiO_{2}-P_{2}O_{5}$ binary glasses C.R.Hammond
  12. J. Electrochem. Soc. v.138 no.9 G.Baret;R.Madar;C.Bernard
  13. J. Soc. Glass. Tech. v.39 W.J.Englert;F.A.Hummel