초연마 저산란 반사경 기판 제작과 평가

Production and measurement of a super-polished low-scattering mirror substrate

Production and measurement of a super-polished few-ppm-scattering mirror substrate are investigated. In order to improve the surface roughness directly determining scattering, the super-polishing process using Bowl-Feed technique is tried. The surface quality of the super-polished substrate is estimated by the phase-measuring interferometer. For the reliable roughness measurement using the interferometer, data averaging method is applied so that the optimal data averaging condition, 30 phase-data averaging and 20 intensity-data averaging, minimizing the measurement error is experimently searched. Based on the optimal data averaging condition, surface roughness of home-made mirror substrate is measured to be less than $0.5{\AA}$ rms corresponding to 2-ppm total-integrated-scattering.