Journal of Korean Ophthalmic Optics Society (한국안광학회지)
- Volume 4 Issue 1
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- Pages.21-25
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- 1999
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- 1226-5012(pISSN)
Sheet Reisistance Analysis of TiNx Thin Film by RF Magnetron Sputtering
RF magnetron 스파터링법으로 제작한 TiNx 박막의 면저항분석
- Park, Moon Chan (Department of Ophthalmic Optics, Shinheung College) ;
- Oh, Jeong Hong (Department of Physics, Inha University) ;
- Kim, Nam Young (Department of Physics, Inha University) ;
- Hwangbo, Chang Kwon (Department of Physics, Inha University)
- Received : 1999.05.24
- Published : 1999.06.30
Abstract
The TiN, thin films were prepared on glass substrate by RF(radio-frequency) magnetron sputtering apparatus from a Ti target in a gaseous mixture of argon and nitrogen. In deposition, a RF power supply was used as a power source with a constant power of 240W, and the substrate was heated to
RF(radio-frequency) magnetron 스퍼터링 장치에 질소가스와 아르곤가스를 동시에 주입하면서 Ti 타켓을 스퍼터링하여 TiN, 박막을 유리기판위에 제작하였다. 박막제작시 RF power supply 출력은 240W로, 증착기 내부의 온도는
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