Crystal Structure and Optical Absorption of ZnO Thin Films Grown by Electrodeposition

전착법에 의한 ZnO 박막의 결정구조 및 광흡수 특성

Zinc oxide(ZnO) thin films were cathodically deposited on ITO glass from an aqueous zinc nitrate electrolyte. Three main fabrication parameters were taken into account : deposition potential, solution concentration and growth temperature. Different layers of ZnO thin films grown by varying the three parameters were studied by X-ray diffraction, scanning electron microscope and optical absorption spectroscopy. The prepared ZnO thin films were shown as a hexagonal wurtzite structure on the X-ray diffraction patterns and the good quality of ZnO thin films were obtained by potentiostatic cathodic deposition at -0.7V vs. Ag/AgCl reference electrode onto ITO glass from aqueous 0.1 mol/liter zinc nitrate electrolyte at $60^{\circ}C$.

질산 아연, $Zn(NO_3)_2$, 수용액 속에서 전착에 의해 ITO 유리기판에 ZnO 박막을 성장하였다. 성장 매개 변수로 용액농도, 성장온도, 및 전착 전위를 선택하였으며, 성장된 박막은 SEM사진과 XRD 및 광흡수 계수 측정을 통해 연구되었다. 성장된 ZnO 박막은 육방정계 wurtzite 구조를 가지며, 질산아연 수용액농도가 0.1mol/liter, 성장온도 $60^{\circ}C$ 및 Ag/AgCl 기준전극에 대한 전위 -0.7V인 조건에서 양질의 ZnO 박막이 성장되었다.