Abstract
The $\alpha$-$Fa_{2}O_{3}/SnO_{2}$ thin film gas sensor was fabricated by APCVD and heat treated. The gas sensitivity to flammable gases ($CH_4$, $H_2$, LPG) was measured. This device was to heat treatment at $400^{\circ}C$, $450^{\circ}C$, $500^{\circ}C$, $550^{\circ}C$, $600^{\circ}C$ for 2 h to enhance the gas sensitivity. The heat treated device at $500^{\circ}C$ for 2 h had the best properties and especially it shows high sensitivity to H2 gas. The sensitivity to gases was studied in the temperature range from lOoC to $300^{\circ}C$ in order to find the optimum detection temperature. In the range of detection from 500 ppm to 10,000 ppm at $175^{\circ}C$ the fabricated device showed that the gas sensitivity to $H_2$ was from 62%~76% and to $CH_4$ was from 16 %~58% and to LPG was from 8%~37 %. The sensitivity difference between heat treated device and as fabricated one was about 10 8 The long-term stability to LPG at 1,000 ppm was converged to sensitivity of 30 %.
APCVD(Atrmos phere Pressure Vapor Deposition)법으로 $\alpha$-$Fa_{2}O_{3}/SnO_{2}$계 박막 가스센서 소자를 제조하여 열처리(Heat treatment)하였으며, 가연성 가스($CH_4$, $H_2$, LPG)에 대하여 감지 특성(Sensitivity)을 측정하였다. 감지특성 향상을 위해 소자를 $400^{\circ}C$, $450^{\circ}C$, $500^{\circ}C$, $550^{\circ}C$, $600^{\circ}C$에서 각각 2시간동안 열처리하였으며 $500^{\circ}C$에서 2시간 동안 열처리하였을 때 가장 우수한 감응도를 조사하였다. 특히 $H_2$에 대하여 가장 민감한 반응을 보였다. 최적의 작동온도를 찾기 위해 $100^{\circ}C$~$300^{\circ}C$으로 변화하며 가스 감응도를 조사하였다. 제작된 소자는 작동온도 $175^{\circ}C$, 측정 범위 500ppm ~ 10,000ppm에서 $H_2$일 경우 감지도가 62%~76%를 가졌으며, $CH_2$의 경우 16%~58%, LPG의 경우 8%~37%이였다. 또한 열처리한 것과 안한 것의 감응도의 차이는 약 10%이었다. LPG 1,000ppm에서의 장기안정성은 감응도 30%의 값으로 수렴하였다.
