- Volume 38 Issue 2
Monitoring and Characterization of Bacterial Contamination in a High-Purity Water System Used for Semiconductor Manufacturing
- Kim, In -Seop (Korea Green Cross Corp. 227-3 Kugal-Ri, Kiheung-Eup, Yougin 449-900. Kyunggi-Do) ;
- Lee, Geon-Hyoung (Major in Biology, School of Science & Technology, College of Natural Sciences, Kunsan National University, Kunsan 573-701) ;
- Lee, Kye-Joon (Laboratory of Fermentation and Biotechnology, School of Biolobical Sciences, Seoul National University, Seoul 151-742)
- Published : 2000.03.01
Hydrogen peroxide has been used in cleaning the piping of an advanced high-purity water system that supplies ultra-high purity water (UHPW) for 16 megabyte DRAM semiconductor manufacturing. The level of hydrogen peroxide-resistant bacteria in UHPW water was monitored prior to and after disinfecting the piping with hydrogen peroxide. Most of the bacteria isolated after hydrogen peroxide disinfection were highly resistant to hydrogen peroxide. However, the percentage of resistant bacteria decreased with time. The hydrogen peroxide-resistant bacteria were identified as Micrococcus luteus, Bacillus cereus, Alcaligenes latus, Xanthomonas sp. and Flavobacterium indologenes. The susceptibility of the bacteria to hydrogen peroxide was tested as either planktonic cells or attached cells on glass. Attached bacteria as the biofilm on glass exhibited increased hydrogen peroxide resistnace, with the resistance increasing with respect to the age of the biofilm regrowth on piping after hydrogen peroxide treatment. In order to optimize the cleaning strategy for piping of the high-purity water system, the disinfecting effect of hydrogen preoxide and peracetic acid on the bacteria was evaluated. The combined use of hydrogen peroxide and peracetic acid was very effective in killing attached bacteria as well as planktonic bacteria.
- Can.J.Microbiol. v.38 bacteriocidal properties of peracetic acid and hydrogen peroxide, alone and in combination, and chlorine and formaldehyde against bacterial water strains Alasri,A.;C.Rocques;G.Michel
- Appl.Environ.Microbiol. v.45 Amino acid assimilation and electron transport system activity in attached and free-living marine bacteria Bright,J.J.;M.Fletcher
- Ultrapure Water no.September Disinfection of high-purity DI piping with peracetic acid Byrne,W.;K.Fulford
- Native aquatic bacteria: estimation , activity and ecology Direct epifluorescence microscopy Daley,R.J.;J.W.Costerton(ed.);R.R.Cowell(ed.)
- J.Microbiol.Methods v.17 A direct viable count method for the enumeration of attached bacteria and assessment of biofilm disinfection Feipeng,P.Y.;B.H.Pyle;G.A.McFeters
- Appl.Environ.Microbiol. v.58 Comparison of assimilable organic carbon and UV-oxidizable carbon for evaluation of UPW systems Governal,R.A.;M.T.Yahya;C.P.Gerba;F.Shadam
- Ultrapure Water no.April Characterization of grganic impurities in high-purity water systems by AOC and TOC Governal,R.A.;C.Gerba;F.Shadman
- Ultrapure Water no.July/August Back to basics: fundamentals in microbiology for high-purity water treatment Harfst,W.F.
- J.Environ.Science. no.May/Jun Bacteria as particle source in wafer processing equipment Harned,W.
- Biosensors v.1 The estimation of microbial biomass Harris,W.F.;D.B.Kell
- Ultrapure Water no.September Microbial control: sanitization or sterilization? It depends on the final use for the high-purity water Henley,M.
- Appl. Environ. Microbiol. v.33 Use of nucleopore filters for counting bacterial by fluorescence microscopy Hobbie, J.E.;R.J. Daley;S. Jasper
- Ultrapure Water no.September Microbials: response of oligotrophic biofilm bacteria in high-purity water system to stepwise nutrient supplementation Husted,G.R.;A.A.Rutkowski
- Can.J.Microbiol. v.42 Influence of peracetic acid on Escheichia coli H10407 strain in laboratory microcosms Jolivet-Gougeon,A.;A.S.Braux;F.Sauvager;M.Arturo-Schaan;M.Cormier
- J.Microbiol.Biotechnol. v.7 Natritional flexibility of oligotrophic and copiotrophic bacteria isolated from deionized-ultrapure water made by high-purity water manufacturing system in a semiconductor manufacturing company Kim,I.S.;S.Kim;J.Hwang
- ASM News v.58 Biofilm: an overview of bacterial adhesion, activity, and control at surfaces Marshall,K.C.
- Microcontaminations v.11 Characterizing biofilm growth in deionized ultrapure water piping systems Martyak,J.;J.Carmody;G.R.Husted
- Ultrapure Water no.September Microorganisms: bacterial ecology of operating laboratory water purification systems McFeters,G.A.;B.H.Pyle;K.K.Siu;Y.Egozy
- Ultrapure Water no.May/June Bacteria: isolation, identification, and microscopic properties of biofilms in high-purity water distribution systems Michael,K.;P.E.Patterson;G.R.Husted;A.Rutkowski
- Ultrapure Water no.May/June Isolation, identification and microscopic properties of biofilm in high-purity water distribution systems Patterson,M.K.;G.R.Husted;D.C.Mayette
- Adv.Micro.Ecol. v.5 Oligotrophy: fast and famine existence Poindexter,J.S.
- Curr.Opinion Microbiol. v.2 Biofilms Stickler,D.
- J.Appl.Bacteriol. v.80 Biological indicator for low temperature steam and formaldehyde sterilization: investigation of the effect of change in temperature and formaldehyde concentration on spores of Bacillus stearothermophilus NCIMB 8224 Wright,A.M.;E.V.Hoxey;C.J.Soper;D.J.G.Davies