고주파대역에서 기판으로 쓰이는 Glass/Ceramics Composite의 소결거동

A sintering Behavior of Glass/Ceramic Composite used as substrate in High Frequency Range

The objective of this study was to investigate the sintering behavior, crystallization characteristic of glass-ceramic and optimal sintering condition on the glass/ceramic composite for fabricating substrate of LTCC. Glass/ceramic composite was made from alumina powder and glass frit, which was composed of SiO2-TiO2-RO-PbO/(R: Ba, Sr, Ca), and was sintered for 0, 30, 60minutes in the temperature range from 700$^{\circ}C$ to 1000$^{\circ}C$. Properties of frit and glass/ceramic compsoite were analyzed by DTA, XRD, SEM and Network Analyzer and so on. Main sintering mechanism was densification occurred above 730$^{\circ}C$ by viscous flow and crystallization starting about 780$^{\circ}C$ affected sintering also. So viscous flow was affected by sintering temperature, duration time, and creation of crystallization phase etc. From this study, it was possible to fabricate glass/ceramic composite by changing sintering temperature and duration time.