Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

A Study on the Saturation of Grain Size in Pb(Zr, Ti)$O_3$ Thin Films

Pb(Zr, Ti)$O_3$ 박막에서 결정립 크기 포화 현상에 관한 연구

  • 이장식 (서울대학교 재료공학부) ;
  • 김찬수 (서울대학교 재료공학부) ;
  • 주승기 (서울대학교 재료공학부)
  • Published : 2000.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

During the grain growth of the PZT thin films by selective nucleation method using PZT seed, it was found that the grain size was saturated with the annealing temperature. The saturation of grain size was analyzed by the interfacial energy which appeared during the crystallization. The factors affecting the saturation of grain size were found to be the interfacial energy between perovskite phase and pyrochlore phase, and PZT thin film and the bottom Pt electrode. When the ion damage was introduced to the grain-size saturated PZT thin films, further lateral growth was observed. Pt bottom electrode thickness was changed to control the interfacial energy between the PZT thin film and the Pt bottom electrode. When Pt thickness was increased, the grain size was also increased, because the lattice parameter of Pt films was increased with the thickness of the Pt films. The incubation time of nucleation was increased with the amount of the ion damage on the Pt films.

Keywords

References

  1. Ferroelectric Ceramics Ferroelectric Ceramics : Tailoring Properties for Specific Applications L. E. Cross;N. Setter(ed.);E. L. Colla(ed.)
  2. Science v.246 Ferroelectric Memories J. F. Scott;C. A. Araujo
  3. Ferroelectrics v.116 Ferroelectric Memories : A Comparison with Other High-speed Digital Devices J. F. Scott;L. D. McMillan;C. A. Araujo
  4. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control v.38 no.6 Electrical and Reliability Properties of PZT Thin Films for ULSI DRAM Applications J. Carrano;C. Sudhama;V. Chikarmane;J. Lee;A. Tasch;W. Shepherd;N. Abt
  5. Integrated Ferroelectrics v.4 Trends in the Development of ULSI DRAM Capacitors P. C. Fazan
  6. Integrated Ferroelectrics v.5 High-permittivity Lead based Perovskite Dielectrics for DRAM Applications R. E. Jones, Jr.;P. D. Maniar;A. C. Campbell;R. Moazzami;C. J. Mogab
  7. J. Vac. Sci. Tech. A v.10 no.4 Integration of Ferroelectric Thin Films into Nonvolatile Memories S. Sinharoy;H. Buhay;D. R. Lampe;M. H. Francombe
  8. J. Vac. Sci. Tech. A v.10 no.1 Ferroelectric Lead Zirconate Titanate Thin Films by Radio Frequency Magnetron Sputtering E. S. Ramakrishnan;W. Y. Howng
  9. J. Korean Phys. Soc. v.27 Control of Pb(Zr,Ti)O₃ Thin Film Characteristics Using Metalorganic Chemical Vapor Deposition M. Shimizu;T. Shiosaki
  10. Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials Controlling Crystalline Orientations of So-Gel PZTs for FRAM and DRAM Applications K. Aoki;Y. Fukuda;K. Numata;A. Nishimura
  11. J. Vac. Sci. Tech. A v.10 no.4 Growth of Ferroelectric Oxide Thin Films by Excimer Laser Ablation S. B. Krupanidhi;N. Maffei;D. Roy;C. J. Peng
  12. J. Appl. Phys. v.49 no.8 Electrical Properties of Lead-Zirconate-Lead-Titanate Ferroelectric Thin Films and Their Composition Analysis by Auger Electron Spectroscopy A. Okada
  13. J. Mater. Res. v.9 no.7 Formation Kinetics of $PbZr_xTi_{1-x}O_3$ Thin Films C. K. Kwok;S. B. Desu
  14. J. Appl. Phys. v.71 no.2 Crystallization of Sputtered Lead Zirconate Titanate Films by Rapid Thermal Processing C. V. R. Vasant Kumar;R. Pascual;M. Sayer
  15. 요업학회지 v.36 no.12 결정립계가 PZT 박막의 유전 특성에 미치는 영향 이장식;박응철;박정호;이병일;주승기
  16. 대한금속ㆍ재료학회지 v.38 no.1 PZT seed에 의한 거대 단결정립 PZT 박막 형성에 관한 연구 이장식;박응철;박정호;이병일;주승기
  17. Appl. Phys. Lett. v.51 no.4 Phosphorous Doping for Hydrogenated Amorphous Silicon Films by a Low-Energy Ion Doping Technique A. Yoshida;K. Setsune;T. Hirao
  18. Mat. Res. Soc. Symp. Proc. v.361 The Pyrochlore-to-Perovskite Transformation in Solution-Derived Lead Zirconate Titanate Thin Films J. A. Voigt;B. A. Tuttle;T. J. Headley;D. L. Lamppa
  19. Elements of X-ray Diffraction, 2nd Ed. B. D. Cullity
  20. J. Appl. Phys. v.81 no.5 Single-Crystal $Pb(Zr_xTi_{1-x})O_3$ Thin Films Prepared by Metal-Organic Chemical Vapor Deposition: Systematic compositional variation of electronic and Optical Properties C. M. Foster;G.-R. Bai;R. Csencsits;J. Vetrone;R. Jammy;L. A. Wills;E. Carr;J. Amano
  21. Ferroelectrics v.225 Effect of Grain Size on Degradation of Pt/PLZT/Pt Capacitor K. Ogata;K. Suenaga;K. Horikoshi;K. Yoshizumi;H. Kato;M. Mori