Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)
- Volume 7 Issue 1
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- Pages.35-40
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- 2000
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- 1226-9360(pISSN)
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- 2287-7525(eISSN)
Characterization of Fluorocarbon Thin Films by Contact Angle Measurements and AFM/LFM
접촉각 측정과 AFM/LFM을 이용한 불화 유기박막의 특성 평가
Abstract
Teflon-like fluorocarbon thin film was deposited on various substrates by vapor deposition using PFDA (perfluorodecanoic acid). The fluorocarbon films were characterized by static/dynamic contact angle analysis, VASE (Variable-angle Spectroscopic Ellipsometry) and AFM/LFM (Atomic/Lateral Force Microscopy). Based on Lewis Acid/Base theory, the surface energy (
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