Abstract
Planar optical waveguides which have a higher refractive index than that of substrate were fabricated by proton exchange between $Li^+$ and $H^+$. Benzoic acid was used as proton source and process was carried out under the various reaction time and temperature. The depth of waveguide layer and the generated mode number were investigated by standard prism coupler. The cut-off depth for the fabrication of single mode optical waveguides was obtained by the function which was expressed on refractive index profile. Finally the experimental conditions for cut-of depth of single mode could be confirmed. Channel waveguides were manufactured from these confirmed conditions and the effective confinement of the induced light into waveguides was observed.
H와 Li의 양자교환법에 의해 평면도파로와 channel도파로를 $LiNbO_3$단결정 기판위에 구현하였다. 양자원으로 피로인산을 사용하였고 평면도파로의 모드들에 대한 유효굴절률을 측정하였으며 반응시간과 반응온도로부터 광도파로의 깊이와 계단형 형태의 굴절률 변화에 대한 식을 구하였다. 이 식에서 구한 단일모드 도파 조건으로 channel 도파로를 제작하였고 입사광의 제한 효과를 관찰하였다.
