Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Technological Trends for Precision Optical Metrology

광계측의 기술동향

  • 김승우 (한국과학기술원 기계공학과)
  • Published : 2000.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

정밀공학에서 측정은 필수적인 의미를 갖는다. 측정할 수 없는 제품 치수는 체계적인 가공이 불가능하며, 이는 설사 가공자의 특수한 기능에 의해 가공이 되더라도 체계적인 양산방식에 의한 생산이 될 수 없음을 의미한다. 이러한 중요성을 갖는 측정기술은 가공기술의 발랄과 더불어 꾸준한 진보를 이루어 왔다.(중략)

Keywords

References

  1. H. Kunzmann, Today's Limits of accuracy in dimensional metology, Proc. of 2nd IMEKO TC14 Int. Symposium on metrology for quality control in production, Beijing, China May, 1989
  2. B. E. A. Saleh et al., Fundamentals of photics, first Eddition, Wiely Interscience, p65, 1991
  3. H. Kunzmann et al., Scales va. Laser interferometers performance and comparison of two systems, Ann. CIRP, Vol. 47/2, p753, 1993
  4. A. Teimel, Technology and application of grating interferometers in high precision measurement, Pro. of the 6th Int. Precision Engineering Seminar, Braunschweig, Germany, p15, 1991
  5. 엄태봉 외, 3차원 측정 및 레이저응용 측정, 정밀측정교재, 한국표준과학연구원, 1992
  6. Becker K and Heynacher E, Ahigh resolution coordinate measuring machine for the testing of X-ray mirrors , SPIE vol. 733(Bellingham WA:SPIE), p.149, 1986
  7. K. Yoshizumi. et al., Ultrahigh accuracy 3-D profilemetry , Appl. Opt. 26, p.1617, 1987
  8. K. Yoshizumi, et al., Ultrahigh accuracy 3-D profilometer using atomic force probe , National Technical Report, Vol. 39, No. 4, p.116, 1993
  9. Mahito Negishi et al., A high-prcision coordinate measuring system for super-smooth polishing , Nanotechnology, Vol. 6, p. 139, 1995 https://doi.org/10.1088/0957-4484/6/4/006
  10. E.C. Teague, The National Institute of Standards and Technology Molecular Measuring Machine Project: Metrology and Precision Engineering Design , J. Vac. Sci. Technol., B7, P.1989, 1989
  11. Daniel Malacara, 'Optical shop testing', Second Edition, Wiely Interscience
  12. Chunsheng Huang, 'Propagation error in precision Fizeau interferometry', Appl. Opt. Vol. 32, No. 34, p7016, 1993
  13. Y. J. Fan, K.G. Struik, P. C. Mulders, C. H. F. Velzel, 'Stitching inteferometry for the CIRP Vol. 46, No. 1, p459 1997 https://doi.org/10.1016/S0007-8506(07)60865-8
  14. Toyohiko Yatagai, 'Phase measuring Ronchi test', Appl. Opt. 27(3), p523, 1988
  15. 이호재, 일반화된 론끼법을 이용한 비구면 측정, 박사학위논문, 한국과학기술원, 1999
  16. D J Whitehouse, Review article: Surface metrology, Meas. Sci. Technol., 8, p955, 1997
  17. Chin Y. Poon et al., Comparison of surface roughness measurements by stylus, AFM and non-contact optical profiler, Wear, 190, p76, 1995
  18. T H McWaid et al., Methods divergence between measurements of micrometer and sub-micrometer surface features, Nanotechnology, 5, p33, 1994
  19. 정명세 외, 표면거칠기, 정밀측정교재, 한국표준연구소, 1984
  20. J.C.Wyant and Creath, Advances in interferometry optical profiling, Int. Int. J.Mach. Tools. manufact, Vol.1/2, No.5-10, 1992 https://doi.org/10.1016/0890-6955(92)90053-J
  21. Creath, Phase-measurement interferometry: beware these errors, Proc. SPIE 1553, 1991
  22. R. Wiesendanger, Scanning Probe Microscopy and Spectroscopy, Cambridge University Press, 1994
  23. Rebecca Howland et al., A Practical Guide : To scanning probe microscopy, Park Scientific Instruments, 1997