Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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A Study on the Pumping Performance of a Disk-type Drag Pump

원판형 드래그펌프의 배기특성에 관한 연구

  • 황영규 (성균관대학교 기계공학부) ;
  • 허중식 (성균관대학교 대학원 기계설계학과) ;
  • 최욱진 (성균관대학교 대학원 기계설계학과)
  • Published : 2000.06.01
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Abstract

Numerical and experimental investigations are performed for the molecular transition and slip flows in pumping channels of a disk-type drag pump. The flow occurring in the pumping channel develops from the molecular transition to the slip flow traveling downstream. Two different numerical methods are used in this analysis: the first one is a continuum approach in solving the Navier-Stokes equations with slip boundary conditions, and the second one is a stochastic approach through the use of the direct simulation Monte Carlo method. In the experimental study, the inlet pressures are measured for various outlet pressures in the range of 0.1{\sim}4Torr. From the present study, the numerical results of predicting the performance, obtained by both methods, agree well with the experimental data for the range of Knudsen number $Kn{\leq}0.1$ (i.e., the slip flow regime). But the results from the second method only agree with the experimental data for Kn>0.1(i.e., the molecular transition regime)

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References

  1. Hablanian, M. H., 1990, High-Vacuum Technology, Marcel Dekker, Inc
  2. Hablanian, M. H., 1994, in Vacuum science and Technology: Pioneers of 20th Century, edited by P. A. Redhead(AIP,New York), pp. 126-132
  3. Chu, J. G., 1987, 'A New Hybrid Molecular Pump with Large Throughput,' J. Vac. Sci. Technol. A, Vol. 6, No.3, pp. 1202-1204 https://doi.org/10.1116/1.575677
  4. Tu, J. Y., Zhu, Y. and Wang, X. Z., 1990, 'A New Design for the Disk-Type Molecular Pump,' J. Vac. Sci. Technol. A, Vol. 8, No.5, pp. 3870-3873 https://doi.org/10.1116/1.576461
  5. Liu, N. and Pang, S. J., 1990, 'Microscopic Theory of Drag Molecular Dynamics in the Range of Free Molecular Flow,' Vacuum, Vol. 41, No. 7-9, pp. 2015-2017 https://doi.org/10.1016/0042-207X(90)94162-J
  6. Shi, L., Wang, X. Z., Zhu, Y. and Pang, S. J., 1993, 'Design of Disk Molecular Pumps for Hybrid Molecular Pumps,' J. Vac. Sci. Technol. A, Vol. 11, No.2, pp. 426-431 https://doi.org/10.1116/1.578748
  7. Shi, L., Zhu, Y., Wang, X. Z. and Pang, S. J., 1993, 'Influence of Clearance on the Pumping Per- formance of a Molecular Drag Pump,' J. Vac. Sci. Technol. A, Vol. 11, No.3, pp. 704- 710 https://doi.org/10.1116/1.578795
  8. Cheng, H. P., Jou, R. Y., Chen, F. Z., Chang, Y. W., Iwane, M. and Hanaoka, T., 1999, 'Flow Investigation of Siegbahn Vacuum Pump by CFD Methodology,' Vacuum, Vol. 53, pp. 227-231 https://doi.org/10.1016/S0042-207X(98)00356-X
  9. Mase, M., Gyoubu., I., Nagaoka, T. and ？Taniyama, M., 1988, 'Development of a New Type of Oil-free Turbo Vacuum Pump,' J. Vac. Sci. Technol. A, Vol. 6, No.4, pp. 2518-2521 https://doi.org/10.1116/1.575539
  10. Murakami, Y., Abe, T., Ohsawa, H. and Hata, S., 1991, 'Development of Turbo-viscous Pump with Ceramic Rotor Assembly and Oil-free Driving Unit,' J. Vac. Sci. Technol. A, Vol. 9, No.3, pp. 2053 -2057 https://doi.org/10.1116/1.577454
  11. Bird, G. A., 1994, Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press. Oxford
  12. 허중식, 김동권,황영규,1998,회전날개 주위 분자천이유동에 관한 수치해석적 연구,'대한기계학회논문집 B, Vol. 22, No. 5, pp.640-650
  13. Sawada, T., 1976, 'Rarefied Gas Flow in a Rectangular Groove Facing a Moving Wall,' Sci. Papers of the Institute of Physical and Chemical Research, Vol. 70, No.4, pp. 79-86
  14. 허중식,황영규,박종윤,1999,'회전날개 주위 분자천이유동의 수치해석방법에 관한 연구,'한국진공학회 논문집, Vol. 8, No. 2, pp.79-86