Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Optical Error Analysis and Compensation of Six Degrees of Freedom Measurement System Using a Diffraction Grating Target

회절 격자 표식을 이용한 6자유도 측정 시스템의 광학적 오차 해석 및 보상

  • Kim, Jong-Ahn (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Bae, Eui-Won (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kwak, Yoon-Keun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 김종안 (한국과학기술원 기계공학과 대학원) ;
  • 배의원 (한국과학기술원 기계공학과 대학원) ;
  • 김수현 (한국과학기술원 기계공학과) ;
  • 곽윤근 (한국과학기술원 기계공학과)
  • Published : 2001.02.01
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Abstract

Six degrees of freedom measurement systems are required in many fields: Precision machine control. precision assembly, vibration analysis, and so on. This paper presents a new six degrees of freedom measurement system utilizing typical features of a diffraction grating. It is composed of a laser source, three position sensitive detectors, a diffraction grating target, and several optical components. Six degrees of freedom displacement is calculated kinematically from the coordinates of diffracted rays on the detectors. Optical measurement error was caused by the fact that a laser source had a Gaussian intensity distribution. This error was analyzed and compensated using simple equations. The performance of the compensation equation was verified in the experiment. The experimental results showed that the compensation equation could reduce the optical measurement error remarkably and the error in six degrees of freedom measurement less than $\pm$10$\mu$m for translation and $\pm$0.012$^{\circ}$for rotation.

Keywords

References

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