Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Synthesis of Nanocrystalline Diamond Film by Hot Filament CVD Method

Hot Filament CVD 방법을 이용한 Nanocrystalline Diamond 박막 합성

  • 강민식 (고려대학교 재료공학과, 한국과학기술연구원 박막기술연구센터) ;
  • 이욱성 (한국과학기술연구원 박막기술연구센터) ;
  • 백영준 (한국과학기술연구원 박막기술연구센터) ;
  • 채기웅 (호서대학교 재료공학과) ;
  • 임대순 (고려대학교 재료공학과)
  • Published : 2001.01.01
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Abstract

Hot filament CVD 방법에서 가스압을 증가시키는 방법을 사용하여 nanocrystalline 다이아몬드 막을 합성하였다. 메탄-수소 혼합가스를 사용하고 메탄함량, 유량, 기판온도합성시간은 각각 4%, 100sccm, 110$0^{\circ}C$, 10시간으로 일정하게 유 였다. 합성 변수로서 가스압을 40 Torr에서 300 Torr 구간에서 변화시켰다. High-resolution SEM으로 막 표면의 형상을 관찰하고, TEM, XRD, micro-Raman spectroscopy를 사용하여 합성된 막의 구조 및 특성을 분석하였다. 합성된 다이아몬드 막은 압력이 높아짐에 따라 mocrocrystalline 다이아몬드 막에서 점진적으로 nanocrystalline 다이아몬드 막으로 변화해갔으며, 가스압에 다라 비다이아몬드 상의 량이 증가하였다. 증착속도는 microcrystalline 다이아몬드 막이 형성되는 구간에서는 압력에 따라 1.1~1.3 $\mu\textrm{m}$/h까지 증가하다가 nanocrystalline 다이아모느 막이 형성되는 구간에서는 압력에 따라 감소하였다. 감소하였다.

Keywords

References

  1. Vacuum v.47 no.11 Hydrogen in Chemical Vapor Deposited Diamond Films T. Sharda;D. S. Misra;D. K. Avasthi
  2. Diamond Relat. Mater. v.9 Growth, Characterization, Optical and X-ray Absorption Studies of Nano-crystalline Diamond Films L. C. Chen;T. Y. Wang;J. R. Yang;K. H. Chen;D. M. Bhusari;Y. K. Chang;H. H. Hsieh;W. F. Pong
  3. Nano-Structured Mater. v.10 no.4 TEM Characterization of Nanodiamond Thin Films L. C. Qin;D. Zhou;A. R. Krauss;D. M. Gruen
  4. J. Appl. Phys. v.84 no.11 High Density Plasma Processing of Nanostructured Diamond Films on Metals S. A. Catledge;Y. K. Vohra
  5. Appl. Phys. Lett. v.68 no.12 Characterization of Nanocrystalline Diamond Films by Core-level Photoabsorption D. M. Gruen;A. R. Krauss;C. D. Zuiker;R. Csencsits;L. J. Terminello;J. A. Carlisle;I. Jimenez;D. G. J. Sutherland;D. K. Shuh;W. Tong;F. J. Himpsel
  6. Mater. Lett. v.36 Novel Two Stage Method for Growth of Highly Transparent Nono-crystalline Diamond Films D. M. Bhusari;J. R. Yang;T. Y. Wang;K. H. Chen;S. T. Lin;L. C. Chen
  7. Appl. Phys. Lett. v.69 no.12 Nucleation and Bulk Films Growth Kinetics of Nanocrystalline Diamond Prepared by Microwave Plasma-enhanced Chemical Vapor Deposition on Silicon Substrates J. Lee;B. Hong;R. Messier;R. W. Collins
  8. Appl. Phys. Lett. v.73 no.12 Temperature Dependence of the Growth Rate for Nano-crystalline Diamond Films Deposited from an Ar/CH₄ Microwave Plasma T. G. McCauley;D. M. Gruen;A. R. Krauss
  9. Diamond Relat. Mater. v.8 Characterization of Ballas Diamond Depositions S. Buhlmann;E. Blank;R. Haubner;B. Lux
  10. J. Vac. Sci. Technol. v.A13 no.3 Carbon Dimer, C2, as a Growth Species for Diamond Films from Methane/hydrogen/argon Microwave Plasma D. M. Gruen;C. D. Zuiker;A. R. Krauss;X. Pan
  11. J. Appl. Phys. v.84 no.4 Control of Diamond Film Microstructure by Ar Additions to CH₄/H₂ Micriowave Plasma D. Zhou;D. M. Gruen;L. C. Qin;T. G. McCauley;A. R. Krauss
  12. Diamond Relat. Mater. v.6 Pressure Dependence of Growth Mode of HFCVD Diamond Z. Yu;A. Flodstrom
  13. Diamond Relat. Mater. v.8 Synthesis of CVD Diamond at Atmospheric Pressure Using the Hot-filament CVD Method T. Kobayashi;K. K. Hirakuri;N. Mutsukura;Y. Machi
  14. J. Mater. Sci. Lett. v.15 Growth of Diamond at the Atmospheric Pressure of Hydrogen and Methane by a Hot-filament Technique R. Ramesham;M. F. Rose;R. F. Askew;R. Myres
  15. J. Mater. Sci. v.17 Growth of Diamond Particles from Methane-hydrogen Gas S. Matsumoto;Y. Sato;M. Tsutsumi;N. Setaka
  16. Diamond Relat. Mater. v.9 Nano-diamond Films Deposited by Direct Current Glow Discharge Assisted Chemical Vapor Deposition A. Heiman;I. Gouzman;S. H. Christiansen;H. P. Strunk;A. Hoffman
  17. Diamond Relat. Mater. v.7 DC-glow Discharge as a Key Step for the Bias-enhanced Nucleation of Diamond by the HFCVD Method I. Gouzman;A. Hoffman
  18. Diamond Relat. Mater. v.8 Influence of Substrate Nature on the D.C.-glow Discharge Induced Nucleation of Diamond I. Gouzman;R. Shima-Edelstein;G. Comtet;L. Hellner;G. Dujardin;S. Roster;A. Hoffman
  19. Diamond Relat. Mater. v.6 Nanocrystalline Diamond Films: Transmission Electron Microscopy and Raman Spectroscopy Characterization L. C. Nistor;J. Van Landuyt;V. G. Ralchenko;E. D. Obraztsova;A. A. Smolin
  20. Thin Solid Films v.368 Chemical Vapor Deposition of Novel Carbon Materials L. Chow;D. Zhou;A. Hussain;S. Kleckley;K. Zollinger;A. Schulte;H. Wang
  21. Diamond Relat. Mater. v.6 The Chemical Nature of the Carbon Precursor in Bias-enhanced Nucleation of CVD Diamond I. Gouzman;B. Fisgeer;Y. Avigal;R. Kalish;A. Hoffman
  22. J. Appl. Phys. v.88 no.4 Deposition and Characterization of Nanocrystalline Diamond Films prepared by Ion Bombardment-assisted Method C. Z. Gu;X. Jiang
  23. Surf. Coat. Thchnol. v.94-95 Durability and Tribological Performance of Smooth Diamond Films Produced by $Ar-C_{60}$ Microwave Plasma and by Laser Polishing A. Erdemir;M. Halter;G. R. Fenske;A. Krauss;D. M. Gruen;S. M. Pimenov;V. I. Konov
  24. Surf. Coat. Technol. v.120-121 Tribological Properties of Nanocrystalline Diamond Films A. Erdemir;G. R. Fenske;A. R. Krauss;D. M. Gruen;T. McCauley;R. T. Csencsits
  25. Diamond Relat. Mater. v.9 Biased Enhanced Growth of Nanocrystalline Diamond Films by Microwave Plasma Chemical Vapor Deposition T. Sharda;T. Soga;T. Jimbo;M. Umeno
  26. J. Cryst. Growth. v.218 Growth and Structural Analysis of Nano-diamond Films Deposited on Si Substrates Pretreated by Various Methods N. Jiang;S. Kujime;I. Ota;T. Inaoka;Y. Shintani;H. Makita;A. Hatta;A. Hiraki
  27. Diamond Relat. Mater. v.6 An Experimental Study of High Pressure Synthesis of Diamond Films Using a Microwave Cavity Plasma Reactor K. P. Kuo;J. Asmussen
  28. Surf. Coat. Technol. v.47 Shape Change During Growth of Diamond Particles and Films Synthesized from CH₄-H₂-(O₂) by Tungsten-filament Chemical Vapor Deposition Y. J. Baik;K. Y. Eun