Electrical Properties of ${Ba_{0.5}}{Sr_{0.5}}{TiO_3}$Thin Film with Various Heat Treatment Conditions

다양한 열처리 조건에 따른 ${Ba_{0.5}}{Sr_{0.5}}{TiO_3}$박막의 전기적 특성

  • 손영국 (부산대학교 재료공학부)
  • Published : 2001.05.01

Abstract

Ba$_{0.5}$Sr$_{0.5}$TiO$_3$타겟을 이용 Pt/Ti/SiO/Si 기판 위에 R.F magnetron sputtering 방법으로 BST 박막을 증착하여 다양한 열처리 조건에 따른 BST 박막의 전기적 성질(정전용량, 누설전류)에 대해 박막의 결정성과 미세구조의 연관성에 대하여 연구하였다. BST 박막의 유전상수는 grain size에 영향 받으며, 열처리 온도가 증가할수록 유전상수는 증가함을 보였고 온도에 따른 누설전류는 저전압 영역에서는 Hopping conduction, 고전압 영역에서는 Schottky conduction mechanism을 따르는 것으로 나타났다.

Keywords

References

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