Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Fabrication of Lithium Nickel Cobaltate Thin-film for the Cathode Material of Microbattery

  • Kim, Duksu (Department of Materials and Science, Korea Advanced Institute of Science and Technology) ;
  • Kim, Mun-Kyu (Department of Materials and Science, Korea Advanced Institute of Science and Technology) ;
  • Son, Jong-Tae (Dong-A Electric Equipment Co. LTD.) ;
  • Kim, Ho-Gi (Department of Materials and Science, Korea Advanced Institute of Science and Technology)
  • Published : 2001.08.01
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Abstract

Electrochemically active lithium nickel cobalt oxide thin-film was not fabricated until now. The thin-film was deposited by RF magnetron sputtering at room temperature, and its initial phase was amorphous. By varying deposition condition, the different characteristics of thin-film were achieved. Using electrochemical analyses, the relationship between physical and electrochemical characteristics was identified. Crystallized thin-film by RTA (Rapid Thermal Annealing) was shown a good capacity and cycle property.

Keywords

References

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