한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제14권4호
  • /
  • Pages.328-335
  • /
  • 2001
  • /
  • 1226-7945(pISSN)
  • /
  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

Ni-Cr-Al-Cu계 박막저항의 전기적 특성

Electrical Characteristic of Ni-Cr-Al-Cu Alloy Thin Film Resistors

  • 이붕주 (인하대학교 전기공학과 기능성박막연구실) ;
  • 차성익 (주식회사 아크로센스) ;
  • 김철수 (전자부품연구원(KETI)) ;
  • 한정인 (전자부품연구원(KETI)) ;
  • 김종택 (인하대학교 전기공학과 기능성박막연구실) ;
  • 이덕출 (인하대학교 전기공학과 기능성박막연구실)
  • 발행 : 2001.04.01
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초록

In this work, we made the precision thin film resistors of NiCr alloy (74wt%Ni-f18wt%Cr-4wt%Al-4wt%Cu) using DC/RF magnetron sputtering method and studied the sheet resistance and TCR(Temperature Coefficient of Resistance) etc... of the Ni-Cr-Al-Cu alloy thin film according to the change by annealing treatment to 400$\^{C}$ in air and nitrogen atmosphere and the change(power, pressure, substrate temperature) of sputtering process.

키워드

참고문헌

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