한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

정밀 위치 결정 기구에서 원통형 구동부의 자세 보정

Correction Method for Orientation of Cylindrical Moving Part in Micro-Positioning Device

  • 조남규 (한양대학교 기계공학과) ;
  • 김도현 (한양대 대학원 정밀기계공학과) ;
  • 권기환 (한양대 대학원 정밀기계공학과)
  • Jo, Nam-Gyu (Dept. of Mechanical Engineering, Hanyang University) ;
  • Kim, Do-Hyeon (Dept. of Precision Mechanical Engineering, Graduate School of Hanyang University) ;
  • Gwon, Gi-Hwan (Dept. of Precision Mechanical Engineering, Graduate School of Hanyang University)
  • 발행 : 2001.11.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper, a new technique and theory are proposed which correct the orientation (inclination of a vertical axis) of a cylinder in vertical-micro positioning device. An algorithm for determining the orientation of the cylinder with a pair of displacement sensor units is derived and two types of the correction methods are described. To assess the performance and efficiency of the developed correction technique, the compensation errors originated from the correction algorithm and the machined characteristics of cylinder surface are evaluated from the geometrical considerations and the statistical techniques. Based upon the evaluation results, the maximum compensation error is estimated for the orientation of cylinder and the optimum correction technique is derived.

키워드

참고문헌

  1. Nahmgyoo CHO, Tadao TSUKADA and Masaaki TAKAHASHI, 'Correction of specimen orientation in three-dimensional measurement of surface roughness with small waviness by contact stylus instrument(1st Report),' International Journal of the Japan Society for Precision Engineering, Vol. 29, No. 2, pp. 156-161, 1995
  2. Nahmgyoo CHO, Tadao TSUKADA and Masaaki TAKAHASHI, 'Correction of specimen orientation in three-dimensional measurement of surface roughness with small waviness by contact stylus instrument(2nd Report),' International Journal of the Japan Society for Precision Engineering, Vol. 29, No. 3, pp. 253-258, 1995
  3. 조남규, '3차원 미세 표면 형상 측정을 위한 시료면의 자세제어에 관한 연구,' 한국 정밀공학회지, 제 11 권, 제 5 호, pp. 5-11, 1994
  4. 조남규, '원통 축 방향의 표면거칠기 측정을 위한 시료의 자세보정,' 한국공작기계학회지, 제 5 권, 제 4 호,pp. 110-112, 1996
  5. Sung-Chong Chung, 'Six degrees of freedom error measuring device for linear motion of slides,' Proceedings of 13th Annual Meeting ASPE, pp. 445-448, 1998
  6. 안형준, 장인배, 한동철, '형상오차가 원통형 정전용량 변위센서의 축 회전오차의 측정에 미치는 영향,' 한국정밀공학회 97년도 추계학술대회 논문집, pp. 487-490, 1997
  7. 전기용량 원기 Vertical cross capacitor 개발, 한국표준과학연구원, KRISS-97-072-IR, pp. 220-221
  8. 전기용량 원기 Vertical cross capacitor 개발, 한국표준과학연구원, KRISS-95-087-IR, pp. 420-432
  9. Nahmgyoo CHO, Tadao TSUKADA and Masaaki TAKAHASHI, 'Measurement of surface roughness with small waviness by contact stylus instrument correcting specimen orientation,' International Journal of the Japan Society for Precision Engineering, Vol. 29, No. 1, pp. 74-79, 1995