UV경화성 수지를 이용한 미세패턴 형성에 관한 연구

A Study on Micro-patterning used the UV-Curable Resin

  • 남수용 (부경대학교 공과대학 화상정보공학부)
  • 발행 : 2001.05.01


UV-curable resin has the properties of quick-drying, thigh productivity at low temperature, energy savint, space saving, solventless, non-polluting and low-stinking, and thus, UV-curing system has been widely used in the fields of printing inks, adhesives, paints and coating agents. This study has been executed to micro-patterning used UV-curable resin, The micro-patterning properties of this photoresist were investigated under irradiation of UV light low pressure mercury lamp. When the exposed photoresist film was developed by pure water developer, the resolution of this photoresist was about 50$\mu\textrm{m}$.