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Enhancement of Pulsed-Laser Ablation by Phase Explosion of Liquid

액체의 상폭발 과정에 의한 펄스 레이저 용발률의 증진

  • Kim, Dong-Sik (Dept. of Mechanical Engineering, Pohang University of Science and Technology) ;
  • Lee, Ho (Dept. of Mechanical Engineering, University of Texas at Austin)
  • Published : 2001.11.01

Abstract

Enhancement of pulsed-laser ablation by an artificially deposited liquid film is presented. Measurements of ablation rate, ablation threshold, and surface topography arc performed. Correlation between material ablation and photoacoustic effect is examined by the optical beam deflection method. The dependence of ablation rate on liquid-film thickness and chemical composition is also examined. The results indicate that photomechanical effect in the phase explosion of liquid is responsible for the enhanced ablation. The low critical temperature of liquid induces explosive vaporization with localized photoacoustic excitation in the superheat limit and increases the ablation efficiency. Experiments were carried out utilizing a Q-swiched Nd:YAG laser at near-threshold laser fluences with negligible plasma effect (up to ∼100 MW/cm$^2$).

Keywords

References

  1. Irnen, K., Lee, S. J., and Allen, S. D., 1991, 'LaserAssisted Micron Scale Particle Removal,' Applied Physics Letters, Vol. 58, pp. 203-205 https://doi.org/10.1063/1.104923
  2. Zapka, W, Tam, A. C, Ayers, G., and Ziemlich, W, J 992, 'Liquid Film Enhanced Laser Cleaning,' Microelectronic Engineering, Vol. 17, pp. 473-478 https://doi.org/10.1016/0167-9317(92)90097-B
  3. Tam, A. C., Leung, W. P., Zapka, W, and ZiemIich, W, 1992, 'Laser-Cleaning Techniques for Removal of Surface Particulates,' Journal of Applied Physics, Vol. 71,pp. 3515-3523 https://doi.org/10.1063/1.350906
  4. Heroux, J. B., Boughaba, S., Ressejac, I., Sacher, E., and Meunier, M., 1996, '$CO_2$ Laser-Assisted Removal of Submicron Particles From Solid Surfaces,' Journal of Applied Physics, Vol. 79, pp. 2857-2862 https://doi.org/10.1063/1.361280
  5. She, M., Kim, D., and Grigoropoulos, C. P., 1999, 'Liquid-Assisted Pulsed Nd:Yag Laser Cleaning' accepted by Journal of Applied Physics https://doi.org/10.1063/1.371617
  6. Berthe, L., Fabbro, R., Peyre, P., Tollier, L., and Bartnicki, E., 1997, 'Shock Waves from a WaterConfined Laser-Generated Plasma,' Journal of Applied Physics, Vol. 82, pp. 2826-2832 https://doi.org/10.1063/1.366113
  7. Peyre, P., Berthe, L., Fabbro, R., Scherpereel, X., and Bartnicki, E., 1997, 'Laser Shock Pressing of Materials: Characteristics and Application of the Process,' ii lasers in Material Processing, SPIE Vol. 3097, pp. 558-569 https://doi.org/10.1117/12.281116
  8. Teng, P., Nishioka, N. S., Anderson, R. R. and Deutsch, T. F., 1987, 'Optical Studies of Pulsed-Laser Fragmentation of Biliary Calculi,' Applied Physics B, Vol. 42, pp. 73-78 https://doi.org/10.1007/BF00694813
  9. Cross, F. W, AI-Dhahir, R. K., and Dyer, P. E., 1988, 'Ablative and Acoustic Response of Pulsed UV LaserIrradiated Vascular Tissue in a Liquid Environment,' Journal of Applied Physics, Vol. 64, pp. 2194-2201 https://doi.org/10.1063/1.341707
  10. Rink, K., Delacretaz, G., and Salathe, R. P., 1992, 'Fragmentation Process Induced by Nanosecond Laser Pulses,' Applied Physics Letters, Vol. 61, pp. 2644-2646 https://doi.org/10.1063/1.108095
  11. Van Leeuwen, T. G., Jansen, E. D., Motamedi, M., and Welch, A. J., 1994, 'Excimer Laser Ablation of Soft Tissue: A Study of the Content of Rapidly Expanding and Collapsing Bubbles,' IEEE Journal of Quantum Electronics, Vol. 30, pp. 1339-1345 https://doi.org/10.1109/3.303700
  12. Oraevsky, A. A., Jacques, S. L., and Tittel, F. K., 1995, 'Mechanisms of Laser Ablation for Aqueous Media Irradiated under Confined-Stress Conditions,' Journal a/Applied Physics, Vol. 78, pp. 1281-1290 https://doi.org/10.1063/1.360370
  13. Paltaut, G. and Schmidt-Kloiber, H., 1996, 'Microcavity Dynamics During Laser-Induced Spallation of Liquids and Gels,' Applied Physics A, Vol. 62, pp. 303-311 https://doi.org/10.1007/s003390050303
  14. Dupont, A., Carninat, P., Boumot, P., and Gauchon, J. P., 1995, 'Enhacement of Material Ablation Using 248, 308, 532, 1064 nm Laser Pulse with a Water Film on the Treated Surface,' Journal of Applied Physics, Vol. 78, pp. 2022-2028 https://doi.org/10.1063/1.360178
  15. Geiger, M., Becker, w., Rebhan, T., Hutfless, J., and Lutz, N., 1996, 'Increase of Efficiency for the XeCI Excimer Laser Ablation of Ceramics,' Applied Surface Science, Vol. 96-98, pp. 309-315 https://doi.org/10.1016/0169-4332(95)00435-1
  16. Ho, J. R., Grigoropoulos, C. P., and Humphrey, J. A. C, 1995, 'Computational Study of Heat Transfer and Gas Dynamics in the Pulsed Laser Evaporation of Metals,' Journal of Applied Physics, Vol. 78, pp. 4696-4709 https://doi.org/10.1063/1.359817
  17. Amoruso, S., Berardi, V, Bruzzese, R., Capobianco, R., Velotta, R., Armenante, M., 1996, 'High Fluence Laser Ablation of Aluminum Targets: Time-of-Flight Mass Analysis of Plasmas Produced at Wavelengths 532 and 355 nm,' Applied Physics A, Vol. 62, pp. 533-541 https://doi.org/10.1007/BF01571689
  18. Park, H. K., Kim, D., and Grigoropoulos, C P., 1996 'Pressure Generation and Measurement in the Rapid Vaporization of Water on a Pulsed-Laser-Heated Surface.' Journal of Applied Phvsics, Vol. 80, pp, 4072-4081 https://doi.org/10.1063/1.363370
  19. Hecht, L, 1986, The Laser Guidebook, McGraw-Hill New York
  20. Weast, R. C, Astle, M. J., and Beyer, W. H. ed., 1986, CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton
  21. Palik, E. D., ed., 1991, Handbook of Optical Constants of Solids ll, Academic Press, San Diego
  22. Carey V. P., 1992, Liquid- Vapor Phase-Change Phenomena, Hemisphere, Washington
  23. Avedisian, C T., 1985, 'The Homogeneous Nucleation Limits of Liquids,' Journal of Physical and Chemical Reference Data, Vol. 14, pp, 695-729
  24. Kelley, J. D., and Hovis, F. E., 1993, 'A Thermal Detachment Mechanism for Particle Removal form Surfaces by Pulsed Laser Irradiation,' Microelectronic Engineering, Vol. 20, pp. 159-170 https://doi.org/10.1016/0167-9317(93)90213-O
  25. Kim, D., Ye, M., and Grigoropoulos, C P., 1998, 'Pulsed Laser Induced Ablation of Absorbing Liquids and Acoustic-Transient Generation,' Applied Physics A, Vol. 67, pp. 169-181 https://doi.org/10.1007/s003390050756