Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
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An Experimental Study on the Nano-adhesion of Octadecyltrichlorosilane SAM on the Si Surface

OTS SAM의 미소 응착 특성에 관한 실험적 연구

  • 윤의성 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 박지현 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 양승호 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 한흥구 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지연구센터)
  • Published : 2001.08.01
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Abstract

Nano adhesion between SPM (scanning probe microscope) tips and 075 (octadecyltrichlorosilane) SAM (self-assembled monolayer) was experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various conditions of relative humidity. OTS SAM was formed on Si-wafer (100) surfaces, and Si$_3$N$_4$ tips of different radius of curvature were used. When the surface was hydrophobic, the adhesion and friction forces were found lower than those of bare Si-wafer. Results also showed that micro-adhesion force increased as the relative humidity and the tip radius of curvature increased. The main parameter for affecting the micro-adhesion was found absorbed humidity on the contact surface. These results were discussed with the JKR model and a capillary force caused by absorbed water.

Keywords

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